41.2: Micro Silicon Technology for Active Matrix OLED Display

Abstract

We developed novel "Micro Silicon" technology for AM-OLED display. The micro crystalline silicon TFTs formed by dLTA (diode Laser Thermal Anneal) system realized uniform and stable current flow in large display area. A 27.3-inch diagonal AM-OLED display was demonstrated to provide applicable solution for OLED TV mass-production.

Selective area crystallization of amorphous silicon using micro-patterned SiO2 capping layer

“…Many companies and researchers are trying to realize uniform and stable current flow in a large display area using low-cost processes [8,9]. Arai et al [10] developed micro-crystalline silicon TFTs formed by diode laser thermal annealing technology. Another group presented a simple and effective method for selective laser crystallization to improve electrical performance and reduce the number of process steps and cost [11].…”

Crystallization of amorphous silicon thin films using nanoenergetic intermolecular materials with buffer layers

“…Several technologies, including solid-phase crystallization, excimer laser crystallization, and metal-induced crystallization, could be employed to produce high-quality poly-Si with larger grain size, lower grain boundary energy, and higher carrier mobility [1][2][3]. However, these technologies represent several limitations, such as long annealing time, poor uniformity due to the scan overlap of laser shots and the incorporation of metal atoms in poly-Si, respectively [4][5][6]. In addition, the process temperature for crystallization of a-Si should be lower than 550 1C to prevent the softening of glass substrates.…”

Laser Beam Shaping Using Hollow Optical Fiber and Its Application in Laser Induced Thermal Printing

“…In the flat panel displays industry, lasers are finding applications in several manufacturing processes such as laser annealing of silicon to a microcrystalline state, [1] laser ablation of indium tin oxide for patterning, [2] and laser induced thermal printing (LITI) of color filter or organic material [3]. LITI is known as the more applicable method than inkjet or thermal evaporation methods for large area, high resolution OLED (organic light emitting diode) fabrication [4].…”