3D self-assembling and actuation of electrostatic micro-mirrors

Quévy, E.; Buchaillot, L.; Bigotte, P.; Collard, Dominique

doi:10.1109/essderc.2000.194802

Cited by 2 publications

(3 citation statements)

References 7 publications

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“…Active methods used to power the rotation include scratch drive actuators [62]- [64], linear vibromotors [65] and microengines [66], [67]. Although these actuators allow dynamic adjustment and have good resolution, they are relatively inaccurate and cannot be used in open loop systems.…”

Section: -D Structuresmentioning

confidence: 99%

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

320

238

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Abstract-Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.[926]Index Terms-Capillary force, microelectromechanical systems (MEMS), microsystems, microoptoelectromechanical systems (MOEMS), self-assembly, surface tension.

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Section: -D Structuresmentioning

confidence: 99%

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Syms¹,

Yeatman²,

Bright

et al. 2003

J. Microelectromech. Syst.

320

238

View full text Add to dashboard Cite

show abstract

“…The 3D structure is obtained thanks to SDAs coupled to a slender beam the length, width and thickness of which are 550, 8 and 0.48lm, respectively Quévy et al 2000). The process flow of a SDA and a contact pad is shown in Fig.…”

Section: Technological Processmentioning

confidence: 99%

“…MEMS device consists in a deformable plate which is fixed to buckled beams Quévy et al 2000). This type of device is used to actuate a continuous-membrane for adaptive optics application.…”

Section: Applicationmentioning

confidence: 99%

Post-buckling dynamic behavior of self-assembled 3D microstructures

Buchaillot¹,

Millet²,

Quévy³

et al. 2007

Microsyst Technol

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The paper presents the snap-through phenomenon in the case of micro fabricated clampedclamped buckled beam. This dynamic post-buckling behavior is likely to occur in 3D microstructures when they are subjected to large vibration amplitudes. The main difference between this work and previous studies is the MEMS specific beam dimension, especially the large initial deflection of the buckled beam that involves the inversion of the two first resonance frequencies. The mathematical development allows showing how the vibration amplitude of the supporting base affects the post-buckling dynamic behavior of the beam. For each frequency, the limit between the stable behavior and the snap-through behavior is evaluated. Moreover, the effect of environment is taken into account from the damping point of view. Samples are fabricated and the experiment is described. Measurements are compared to the theoretical approach and the results are in good agreement with the proposed model.

show abstract

3D self-assembling and actuation of electrostatic micro-mirrors

Cited by 2 publications

References 7 publications

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Surface tension-powered self-assembly of microstructures - The state-of-the-art

Post-buckling dynamic behavior of self-assembled 3D microstructures

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