Post-buckling dynamic behavior of self-assembled 3D microstructures

Abstract

The paper presents the snap-through phenomenon in the case of micro fabricated clampedclamped buckled beam. This dynamic post-buckling behavior is likely to occur in 3D microstructures when they are subjected to large vibration amplitudes. The main difference between this work and previous studies is the MEMS specific beam dimension, especially the large initial deflection of the buckled beam that involves the inversion of the two first resonance frequencies. The mathematical development allows showing how the vibration amplitude of the supporting base affects the post-buckling dynamic behavior of the beam. For each frequency, the limit between the stable behavior and the snap-through behavior is evaluated. Moreover, the effect of environment is taken into account from the damping point of view. Samples are fabricated and the experiment is described. Measurements are compared to the theoretical approach and the results are in good agreement with the proposed model.

Bistability of curved microbeams actuated by fringing electrostatic fields

“…On the other hand, bistable micro-devices exhibit rich dynamic behavior and represent a convenient platform for theoretical and experimental investigation of dynamic phenomena abundant at the microscale but rarely encountered or difficult to envisage within large scale structures. While variety of architectures were reported, an electrostatically actuated curved microbeams with clamped ends have recently emerged as a focus of intense studies [1,3,4,6,7,10,16]. This is perhaps since these structures represent the simplest architectures employed in demonstrating a wide spectrum of complex phenomena typically exhibited in bistable devices.…”

“…Bistable microstructures continue to attract attention of researchers working in the area of micro-and nano-electromechanical systems (MEMS/NEMS) design and analysis [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. The reason for this interest is in functional advantages of this kind of devices in applications.…”

Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

“…Zhang et al [11] conducted some experimental and theoretical investigations of initially curved clamped-clamped beams when excited by a DC load and examined how this was affected by the level of curvature of the microbeams and the electrostatic load. Buchaillot et al [12] also conducted experimental and theoretical investigation of the dynamic of snap through motion for initially curved clamped-clamped beams when subjected to vibration.…”

Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

“…They developed a two-degree-of-freedom reduced order model based on the Galerkin approach. Buchaillot et al [27] studied the dynamic snap-through phenomenon on highly-raised buckled micro beams. They fabricated and tested micro clamped-clamped buckled beams with high vibration amplitudes.…”