3D Parametric‐Library‐Based MEMS/IC Design

Lorenz, G.; Schropfer, G.

doi:10.1002/9783527647132.ch17

Cited by 9 publications

(6 citation statements)

References 6 publications

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“…The first step is to create an accurate, nonlinear, multiphysics representation of the capacitive MEMS gyroscope using Coventor's MEMS/IC co-design tool MEMS+ [3]. MEMS+ is based on a library of parametric building blocks that the MEMS designer uses to assemble the desired geometry.…”

Section: Reference Model Creationmentioning

confidence: 99%

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A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

Parent

Krust

Lorenz

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as quadrature, amplitude-dependent frequency shifting and electrostatic softening. The reduction algorithm has been implemented in the commercial MEMS/IC co-design tool MEMS+. The approach's effectiveness is validated for a state-ofthe-art, three-axis, capacitive gyroscope from Murata Electronics by comparing simulations of the created Verilog-A model with experimental data.

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Section: Reference Model Creationmentioning

confidence: 99%

“…5 (see section V). MEMS+ provides two native interfaces which allow the simulation of the full model inside MATLAB Simulink ® or Cadence Virtuoso ® [3]. While MEMS/IC co-simulation is possible, transient simulations are likely perceived as to slow for MEMS/IC co-design.…”

Section: Reference Model Creationmentioning

confidence: 99%

A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

Parent

Krust

Lorenz

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

Self Cite

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show abstract

“…The ROM relies on an accurate, nonlinear, multiphysics representation of the capacitive MEMS gyroscope in Coventor's MEMS/IC co-design tool MEMS+ ® [5]. MEMS+ is based on a library of parametric building blocks that the MEMS designer uses to assemble the desired geometry.…”

Section: Reference Model Creationmentioning

confidence: 99%

“…The accurate capture of nonlinear electromechanical coupling effects was verified against experimental data as seen in Figure 4 and Figure 5. MEMS+ provides two native interfaces which allow the simulation of the full model (1) inside MATLAB Simulink ® or Cadence Virtuoso ® [5]. While MEMS/IC co-simulation is possible, transient simulations are likely perceived as too slow for MEMS/IC co-design.…”

Section: Reference Model Creationmentioning

confidence: 99%

Efficient nonlinear simulink models of MEMS gyroscopes generated with a novel model order reduction method

Parent¹,

Krust²,

Lorenz³

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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This paper reports a novel model order reduction approach for creating fast-running, nonlinear, multiphysics models of MEMS sensors for Simulink. The accuracy of this new approach is validated for a state-of-the-art threeaxis capacitive gyroscope from Murata Electronics ( Figure 1). A nonlinear reduced-order model (ROM) of the gyroscope that preserves the electrostatic softening effect and Coriolis sensing is generated. Comparisons to measured data showed that the generated ROM accurately predicts nonlinear behavior while preserving fast simulation speed.

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“…We started from a fully working Coventor MEM8+ model [1] of a MEM8 accelerometer in 8T's THELMA technology [2]. The THELMA technology is ST's fabrication flow for the various inertial sensors (accelerometers and gyroscopes) that were produced during the last years and made the success of ST as the leading MEM8 manufacturer.…”

Section: Mems Accelerometermentioning

confidence: 99%

A MEMS design methodology for model-order-reduction, based on high-order parametric elements

Sanginario

Schropfer

Zerbini

et al. 2014

The Tenth International Conference on Advanced Semiconductor Devices and Microsystems

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3D Parametric‐Library‐Based MEMS/IC Design

Cited by 9 publications

References 6 publications

A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

Efficient nonlinear simulink models of MEMS gyroscopes generated with a novel model order reduction method

A MEMS design methodology for model-order-reduction, based on high-order parametric elements

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