3D-Architected and Integrated Metal Oxide Nanostructures and Beyond Produced by Three-Dimensional Nanotemplate Pulsed Laser Deposition

Abstract

A novel nanofabrication technique, namely three-dimensional (3D) nanotemplate pulsed laser deposition, that can typically be useful for metal oxides has been developed by combining inclined pulsed laser deposition with a 3D nanotemplate prepared by nanoimprint lithography. This method enables the production of size-adjustable and extremely small functional oxide nanostructures with a high packing density over a large area, with high controllability of their shape, location, and alignment. We report various 3D functional metal oxide nanostructures, such as a luminescent ZnO nanobox structure, a ferromagnetic semiconductor (Fe,Zn)3O4 nanobox structure, an (Fe,Mn)3O4 epitaxial nanowall wire structure, and an in-plane metal-oxide-semiconductor hetero epitaxial nanowire structure. These nanostructures should be good candidates for optoelectronic, spintronic, and electronic nanoscale device applications.

Creation and Evaluation of Atomically Ordered Side- and Facet-Surface Structures of Three-Dimensional Silicon Nano-Architectures

“…The creation and observation methods for well-defined surfaces enable the epitaxial growth of an arbitrary geometry, a key technique for nanoconstruction in 3D space [26][27][28][29][30][31]. Therefore, our established methodology contributes to the realization of well-ordered 3D nanofabrication, where the material stacking direction can be perfectly switched between the out-of-plane and in-plane directions.…”

“…Atomically well-defined side-surfaces on a substrate can make an enormous contribution to nanofabrication [26][27][28][29][30][31]. To demonstrate the applicability of material growth on such side-surfaces, we produced Si 111 fg -Fe and Si 111 fg -Ag reconstructed side-surface structures on 3D Si with vertical 111 fg 7Â7 side-surfaces.…”

Methods of creating and observing atomically reconstructed vertical Si{100}, {110}, and {111} side-surfaces

“…Atomically well-defined side-surfaces on a substrate can make an enormous contribution to nanofabrication. 6,14,15) To demonstrate the applicability of material growth on such side-surfaces with atomic resolution, we produced Si{111}-Fe side-surface structures and investigated them using TEM. 12 Si , which are similar to those in previous reports on Fe on a 2D Si(111) surface.…”