30 Years of atomic force microscopy: Creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners

Habibullah, Habibullah

doi:10.1016/j.measurement.2020.107776

Cited by 35 publications

(14 citation statements)

References 75 publications

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“…However, the residual displacement will occur more slowly over several minutes. [119] This creep, also referred to as drift (not to be confused with thermal drift), occurs when there is a large variation of the drive voltage, [120] such as the start of a new scan, scan offset, and scan zoom. The distortions observed, often elongation and stretching of features, stabilize over time (Figure 25C), at which point, it is recommended to record a new scan.…”

Section: Effect Of Non-linearity and Calibrationmentioning

confidence: 99%

Experimental methods in chemical engineering: Atomic force microscopy − AFM

et al. 2022

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Atomic force microscopy (AFM), part of the scanning probe microscopy family, exploits the local interaction forces between the sharp tip of a scanning mechanical probe and a material sample to profile its surface topography or map mechanical and tribological properties over nanometre to micron length scales. AFM images the topography at a sub‐angstrom resolution in height and sub‐nanometre to nanometre lateral resolution for diverse materials spanning extremely soft biological samples to hard metals in air, fluid, or vacuum. The accuracy of dimensional metrology measurements depends on the probe tip radius and geometry, calibration of the piezoelectric scanner movement, and applied force. A number of experimental aspects must be considered to ensure imaging reproducibility and maximize imaging resolution. These considerations include sample preparation, imaging environment, choice of AFM mode and probe, and imaging parameters. AFM offers specialized modes to characterize materials properties such as surface potential, electrochemical reactivity, and electrical and magnetic properties. Recent advances combine AFM and infrared spectroscopy to simultaneously map the surface topography and distribution of chemical species. High‐speed or fast‐scanning AFM captures dynamic structural changes and (bio)molecular processes occurring on the millisecond time scale. Every year, Web of Science indexes over 3200 articles that appear when adding AFM and microscopy in the search field topic. A bibliometric analysis grouped AFM research into five clusters: (1) mechanical properties, membranes, and adhesion, (2) morphology, microstructure, and roughness, (3) spectroscopy, nanocomposite, and oxide, (4) adsorption and steel, and (5) polymer and wettability.

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Section: Effect Of Non-linearity and Calibrationmentioning

confidence: 99%

Experimental methods in chemical engineering: Atomic force microscopy − AFM

et al. 2022

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“…Recalling the candidate Lyapunov function from Eq. 9, then the time derivative of along the system trajectory can be achieved as: (10) substituting the learning term from Eq. 8 into…”

Section: Proofmentioning

confidence: 99%

“…As a model-based control method, in feedforward control, the hysteresis model is essential [6]. Deriving an accurate hysteresis model is not only a complex process but also is a timeconsuming process [10].…”

Section: Introductionmentioning

confidence: 99%

A Tracking Robust Learning Control for Micro Scale Actuator Systems

2021

IJOMAM

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In this paper, a robust sliding mode-based learning control (RSMLC) scheme is developed for a micro-scale actuator (MSA) system. By exploiting the instantaneous information of the system closed-loop stability, a sliding mode controller based on the recursive learning technique is designed. The proposed control approach can govern the sliding variable and tracking error between the desired references and actual displacement of the MSA to asymptotically converge to zero. Unlike conventional sliding mode control (CSMC), no prior knowledge of MSA system uncertainties and parameters variation is required in the RSMLC design. Besides, there is no explicit switching element in the RSMLC structure, it can be considered as a chattering free control method. Meanwhile, the inherent high robustness property of the CSMC is fully preserved in the proposed controller. Where the learning algorithm continuously adjusts the closed-loop response based on the most recent history of closed-loop stability. Thus, the stability and convergence analysis of the RSMLC is proved rigorously. Simulation studies have been conducted for a piezoelectric actuator (PEA) system, as a prototype of MSA. For comparison reasons, these results are presented correspondingly with CSMC results to demonstrate the effectiveness of the proposed controller over the CSMC.

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“…Piezoelectric actuators are widely used in the field of micro-/nanopositioning with the continuous development of manufacturing [1] for products such as atomic force microscopes [2,3], fast tool servos (FTSs) [4,5], and piezoelectric inkjet printers [6,7]. Piezoelectric actuators have the advantages of high frequency response, high stiffness, and high resolution [8,9].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators

Wang

et al. 2021

Micromachines

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Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.

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30 Years of atomic force microscopy: Creep, hysteresis, cross-coupling, and vibration problems of piezoelectric tube scanners

Cited by 35 publications

References 75 publications

Experimental methods in chemical engineering: Atomic force microscopy − AFM

Experimental methods in chemical engineering: Atomic force microscopy − AFM

A Tracking Robust Learning Control for Micro Scale Actuator Systems

Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators

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