Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators

Abstract

Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.

Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control

“…Unfortunately, PEAs present some limitations. They typically operate over limited displacement ranges and exhibit nonlinear behavior due to certain phenomena such as hysteresis [ 11 , 12 ], creep [ 13 ], and temperature sensitivity [ 14 ]. Furthermore, they require high driving voltages and sophisticated control electronics, which can increase system complexity and cost [ 15 ].…”

Editorial for the Special Issue on Piezoelectric Transducers: Materials, Devices and Applications, Volume II

“…This is the second volume of the Special Issue focused on piezoelectric transducers, covering a wide range of topics, including the design, fabrication, characterization, packaging, and system integration or final applications of mili/micro/nano-electro-mechanical systems-based transducers, featuring piezoelectric materials and devices. This new volume has compiled a total of 14 papers, with the latest advances in areas such as hysteresis compensation [1][2][3], cylindrical piezoelectric transducers [4], flextensional devices for underwater applications [5], electromechanical transformers [6], actuators for image stabilization [7], electric current sensing [8], rotary and linear ultrasonic motors [9,10], locomotion of miniature robots [11], displacement amplification structures [12] nanoparticles with piezoelectric properties [13], and a review paper on aerospace applications [14].…”