Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens

Sun, Jingbo; Litchinitser, Natalia M.

doi:10.1021/acsnano.7b07185

Cited by 47 publications

(33 citation statements)

References 36 publications

(52 reference statements)

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“…85,86 The hyperlens is a curved hyperbolic metamaterial consisting of a metal/ dielectric multilayered structure, enabling the conversion between the evanescent wave components propagating waves. 47 A circularly polarized Gaussian light beam from a 405-nm laser source was converted into a radially polarized vortex beam using a vortex converter that consisted of concentric rings of Cr integrated on the outer surface of the hyperlens. The beam was then demagnified by a hyperlens formed of 26 alternating layers of Ag and Ti 3 O 5 to be an annular spot with a diameter of 300 nm.…”

Section: Nanoscale Helical Surface Reliefmentioning

confidence: 99%

“…41 It should be further noted that near-field optical devices based on nano-/microstructured materials, such as metasurfaces, 42 photonic/plasmonic crystals, 43,44 and scanning near-field optical microscope probes, 45 have advanced significantly in recent years, such that we may readily generate optical vortices with orbital AM at the nanoscale. 46,47 Such near-field optical devices should further enable subwavelength-scale interaction between optical fields and matter beyond the diffraction limit.…”

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confidence: 99%

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Twisted mass transport enabled by the angular momentum of light

et al. 2020

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Light may carry both orbital angular momentum (AM) and spin AM. The former is a consequence of its helical wavefront, and the latter is a result of its rotating transverse electric field. Intriguingly, the light-matter interaction with such fields shows that the orbital AM of light causes a physical "twist" in a range of materials, including metal, silicon, azopolymer, and even liquid-phase resin. This process may be aided by the light's spin AM, resulting in the formation of various helical structures. The exchange between the AM of light and matter offers not only unique helical structures at the nanoscale but also entirely novel fundamental phenomena with regard to the light-matter interaction. This will lead to the future development of advanced photonics devices, including metamaterials for highly sensitive detectors as well as reactions for chiral chemical composites. Here, we focus on interactions between the AM of light and azopolymers, which exhibit some of the most diverse structures and phenomena observed. These studies result in helical surface relief structures in azopolymers and will leverage next-generation applications with light fields carrying optical AM.

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Section: Nanoscale Helical Surface Reliefmentioning

confidence: 99%

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confidence: 99%

Twisted mass transport enabled by the angular momentum of light

et al. 2020

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“…8. Hyperlens made of (a) mutlilayer HMM in a hemi-cylindrical [83] and spherical [85,86] geometry, and (b) plasmonic nanowires HMM in a radial geometry [87]. Subdiffraction objects are resolved by hyperlens in the far-field image.…”

Section: Hyperlens -Super Resolution Microscopymentioning

confidence: 99%

“…Later, the hyperlens in a semi-spherical curved multilayer HMM composed of 9 periods of Ag/Ti 3 O 5 was demonstrated for visible wavelength of 410 nm [85]. Reversely, the hyperlens is suggested to achieve high resolution patterning in photolithography [86]. Apart from the multilayer geometry, nanowires arranged in radial geometry on a planar surface was demonstrated in the microwave frequency [88] and visible wavelengths [87].…”

Section: Hyperlens -Super Resolution Microscopymentioning

confidence: 99%

Optics with hyperbolic materials [Invited]

Takayama

Lavrinenko

2019

J. Opt. Soc. Am. B

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“…Figure f shows a reflective layer enhanced hyperlens for demagnifying imaging lithography with a demagnification ratio of ≈1.85 . By further combining several cascaded hyperlenses, much higher resolution and larger ratio could be achieved …”

Section: Applicationsmentioning

confidence: 99%

Methodologies for On‐Demand Dispersion Engineering of Waves in Metasurfaces

Guo

et al. 2019

Advanced Optical Materials

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IntroductionMetasurfaces and surface waves are two booming research branches in modern optics and wave physics. As 2D counterparts of 3D metamaterials, metasurfaces have inherited many unusual properties of artificially structured metamaterials, e.g., negative refraction, super-resolution imaging, and invisibility. [1][2][3][4][5][6] Nevertheless, owing to the reduced dimension, metasurfaces are much easier to fabricate, thus providing possibilities to transform theoretical innovations to practical applications. [7,8] In principle, the mechanisms of light-matter interaction in metasurfaces are related to the exotic physical properties of surface waves on metasurfaces. There are many kinds of surface waves propagating along interfaces of two kinds of media, such as surface plasmons, Dyakonov, Bloch, and Tamm surface waves. [9,10] Surface plasmons require that one of the media has negative permittivity; Dyakonov surface waves require linear anisotropy of at least one of the media. Bloch and Tamm surface waves require periodic permittivity of one of the media truncated by the interface or along the interface. In this paper, we would like to highlight the Dispersion is one common yet critical property of all kinds of waves. It is related to the spatial and spectral evolution of waves in structured materials. This review gives a summary of the methodologies used for the on-demand dispersion engineering of waves in metasurfaces, which possess many unusual properties such as extremely short wavelength, diffraction-less directional propagation, and tunable phase shift, resulting in many exciting applications with performances beyond the limitations set by traditional geometric and physical optics. Since most metasurfaces could be continuously transformed from simple thin films, the methodologies proposed here are universal and may be applied to analyze and design various functional metasurfaces. Dispersion EngineeringWithout loss of generality, the geometry of almost all metasurfaces could be continuously transformed from simple thin films. The transformation process is illustrated in Figure 1. First, by stacking and bending multilayers, one obtain the superlens, planar hyperlens, and curved hyperlenses. [26][27][28] The hyperbolic dispersion in anisotropic metal-dielectric structures may lead to the formation of Dyakonov plasmons, which are similar to Dyakonov waves on anisotropic dielectric materials. [29][30][31][32][33][34] Second, a 90° rotation of the multilayer would result a 1D grating, which can be either periodic or gradient. Third,

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Toward Practical, Subwavelength, Visible-Light Photolithography with Hyperlens

Cited by 47 publications

References 36 publications

Twisted mass transport enabled by the angular momentum of light

Twisted mass transport enabled by the angular momentum of light

Optics with hyperbolic materials [Invited]

Methodologies for On‐Demand Dispersion Engineering of Waves in Metasurfaces

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