2012
DOI: 10.1364/oe.20.002507
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25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions

Abstract: A high-speed depletion-mode silicon-based microring modulator with interleaved PN junctions optimized for high modulation efficiency and large alignment tolerance is demonstrated. It is fabricated using standard 0.18 μm complementary metal-oxide-semiconductor processes and provides low V(π)L(π)s of 0.68 V·cm to 1.64 V·cm with a moderate doping concentration of 2 × 10(17) cm(-3). The measured modulation efficiency decreases by only 12.4% under ± 150 nm alignment errors. 25 Gbit/s non-return-zero modulation with… Show more

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Cited by 130 publications
(72 citation statements)
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References 31 publications
(10 reference statements)
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“…Mach-Zehnder interferometer (MZI) and ring resonator based silicon modulators exploiting the plasma dispersion effect were extensively optimized over the past few years [3][4][5][6] and play a critical role in silicon transceiver prototypes emerging now [7][8][9]. However, MZI based modulators suffer from a large footprint, typically a few millimeters [6], and ring or disk modulators exhibit a narrow optical bandwidth, making them difficult to control and sensitive to temperature variations or fabrication errors [5].…”
Section: Introductionmentioning
confidence: 99%
“…Mach-Zehnder interferometer (MZI) and ring resonator based silicon modulators exploiting the plasma dispersion effect were extensively optimized over the past few years [3][4][5][6] and play a critical role in silicon transceiver prototypes emerging now [7][8][9]. However, MZI based modulators suffer from a large footprint, typically a few millimeters [6], and ring or disk modulators exhibit a narrow optical bandwidth, making them difficult to control and sensitive to temperature variations or fabrication errors [5].…”
Section: Introductionmentioning
confidence: 99%
“…The first of such devices was proposed in 2009 by Li et al [44]. Recently there has also been some experimental demonstrations of modulation from interleaved devices as summarised in Table 3 [31,[45][46][47].…”
mentioning
confidence: 99%
“…High-bandwidth advanced modulation signals can be also realized in silicon microring modulators, which hold the promise to achieve extremely low power consumption due to their micron-meter sizes [33,[76][77][78][79]. The resonant transmission of a microring comes with a dramatic phase change around the resonant wavelength.…”
Section: Coherent Transmittersmentioning
confidence: 99%