2008 IEEE International Electron Devices Meeting 2008
DOI: 10.1109/iedm.2008.4796805
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15nm-diameter 3D stacked nanowires with independent gates operation: ΦFET

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Cited by 102 publications
(68 citation statements)
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“…[1][2][3][4][5][6][7] The future may see the use of threedimensional (3D) MOSFETs, such as vertically stacked SiNW FETs, [8][9][10][11][12] for high device densities. An asymmetric channel structure is expected for the vertically stacked SiNW FETs because of the fabrication processes.…”
mentioning
confidence: 99%
“…[1][2][3][4][5][6][7] The future may see the use of threedimensional (3D) MOSFETs, such as vertically stacked SiNW FETs, [8][9][10][11][12] for high device densities. An asymmetric channel structure is expected for the vertically stacked SiNW FETs because of the fabrication processes.…”
mentioning
confidence: 99%
“…Indeed, silicon nanowires (SiNWs) are considered a very promising nanodevice technology for lowpower systems because of their ultimate mono-dimensional semiconductor properties combined with the vast experience and investment in Si technologies. Fabrication technologies for SiNW have been the object of recent investigation through bottom-up [ Yu and Lieber 2010;Heinzig et al 2011;Yan et al 2011] and top-down [Dupré et al 2008;Bera et al 2006] approaches.…”
Section: Low-power High-performances Devices: Towards Thin Devicesmentioning
confidence: 99%
“…Thus, for a given value of silicon thickness and oxide (t si =10 nm and t ox =1.5 nm) the corresponding minimum length for the bulk, thin BOX FDSOI, and nanowire are 20 nm, 15 nm and 10 nm respectively. That is why ITRS recommends nanowires for technology node sub-22nm (International (Dupre & al., 2008), twin (Hwi Cho & al., 2007) or single Ω-FET nanowires (Tachi & al., 2009). In the following, a complete study of the electrostatics of nanowire MOSFETs is performed including all the ultimate physical phenomena which can occur in future electronic devices.…”
Section: Fig 1 A) Different Mosfet Architectures Observed By Tem (Fmentioning
confidence: 99%
“…Insulator FDSOI (Barral & al., 2007a), Double Gate (Barral & al., 2007b), finFET (Dupre & al., 2008) and stacked nanowires (Dupre & al., 2008)); b) schematics of the downscaling concept.…”
Section: Fig 1 A) Different Mosfet Architectures Observed By Tem (Fmentioning
confidence: 99%