13.5
                nm
           extreme ultraviolet emission from tin based laser produced plasma sources

Hayden, P.; Cummings, A.; Murphy, Nicola; O’Sullivan, Gerry; Sheridan, Paul; White, J.; Dunne, Padraig

doi:10.1063/1.2191477

Cited by 62 publications

(57 citation statements)

References 35 publications

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“…A ceramic based on SiO 2 and Spectraflux V R mixed with varied amounts of another metal oxide such as (SnO 2 ) and heated in a tube furnace at temperatures between 900 and 1250 C can produce a homogeneous dispersion of Sn in SiO 2 . 97 Organic foams with densities in the range 2-80 mg/cm 3 have been used as host materials for high Z doping. The choice of the host polymer depends on the elemental composition, nanostructure, density range, and other factors required for the experiment.…”

Section: Dopingmentioning

confidence: 99%

A review of low density porous materials used in laser plasma experiments

2018

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This review describes and categorizes the synthesis and properties of low density porous materials, which are commonly referred to as foams and are utilized for laser plasma experiments. By focusing a high-power laser on a small target composed of these materials, high energy and density states can be produced. In the past decade or so, various new target fabrication techniques have been developed by many laboratories that use high energy lasers and consequently, many publications and reviews followed these developments. However, the emphasis so far has been on targets that did not utilize low density porous materials. This review therefore, attempts to redress this balance and endeavors to review low density materials used in laser plasma experiments in recent years. The emphasis of this review will be on aspects of low density materials that are of relevance to high energy laser plasma experiments. Aspects of low density materials such as densities, elemental compositions, macroscopic structures, nanostructures, and characterization of these materials will be covered. Also, there will be a brief mention of how these aspects affect the results in laser plasma experiments and the constrictions that these requirements put on the fabrication of low density materials relevant to this field. This review is written from the chemists' point of view to aid physicists and the new comers to this field.

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Section: Dopingmentioning

confidence: 99%

A review of low density porous materials used in laser plasma experiments

2018

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“…In order to increase of the spectral purity and the EUV CE, we use the low-density Gd target, such as the low-density Sn target for 13.5-nm EUV sources [7,9,21]. The laser intensity dependence on the EUV CE in Fig.…”

Section: Fig 2: Laser Intensity Dependences On the Euv Ce (A) And Thementioning

confidence: 99%

“…The spectral behavior of Gd and Tb plasmas is expected to be similar to that of Sn plasmas for the 13.5-nm EUV sources [4][5][6][7][8][9][10], because of the similar atomic structure of 4d open-shell ions [11]. Previous work on rare-earth plasma EUV sources has been focused on absorption spectroscopy by generating quasicontinuum spectra at low laser power [12,13].…”

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confidence: 99%

Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

Ôtsuka

Kilbane

Higashiguchi

et al. 2010

Applied Physics Letters

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We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6×1012 W/cm2 at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets.

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“…Calculated spectra for tin plasmas under different laser power densities and pulse durations are presented and the results compared to experiments undertaken at UCD 28 and those reported in the available literature. The conversion efficiency (CE), defined as the percentage of laser energy converted to in-band radiation, is given in Eq.…”

Section: Results and Comparison With Experimentsmentioning

confidence: 99%