Image quality improvement in a hard X-ray projection microscope using total reflection mirror optics

Abstract

A new ®gure correction method has been applied in order to fabricate an elliptical mirror to realize a one-dimensionally diverging X-ray beam having high image quality. Mutual relations between ®gure errors and intensity uniformities of diverging X-ray beams have also been investigated using a wave-optical simulator and indicate that ®gure errors in relatively short spatial wavelength ranges lead to high-contrast interference fringes. By using a microstitching interferometer and elastic emission machining, ®gure correction of an elliptical mirror with a lateral resolution close to 0.1 mm was carried out. A one-dimensional diverging X-ray obtained using the fabricated mirror was observed at SPring-8 and evaluated to have a suf®ciently¯at intensity distribution.

Phase retrieval for object and probe in the optical near-field

“…Focusing X-rays however comes at a price: Strong aberrations caused by surface defects of the mirrors on the nanometer scale cause a highly structured probe [29]. An example can be seen in the left part of Fig.…”

“…at the GINIX-setup (Göttingen Instrument for Nano-Imaging with X-Rays) at DESY (Deutsches Elektronen Synchrotron) and at imaging beamlines of ESRF (European Synchrotron Radiation Facility). Surface roughness of these mirrors, which is of the order of nanometers, causes strong defocus interference fringes [29]. An example is depicted in Fig.…”

Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

“…A reflected image is very sensitive to the surface profile under coherent illumination; speckle patterns are produced from nanoscale protrusions on the reflection surface. [10][11][12] Figure 4 shows a schematic of the experimental setup at the third experimental hutch of BL29XUL of SPring-8. X-ray images reflected from the mirror before and after applying a voltage of 250 V to all the electrodes were observed using an x-ray zooming tube and a CCD camera (C5333, Hamamatsu Photonics).…”

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

“…When the surfaces of the workpiece and powder particles come in contact with each other and are subsequently separated, there is a notable probability that the topmost atoms on the workpiece will preferentially adhere to and thus move onto the surface of the powder particle. In NC EEM, nozzle-type EEM heads are employed to generate high-shear-rate flows of ultrapure water on the workpiece surface to transport fine powder particles 9) . Removal depth closely correlates to the dwelling time of the EEM head, so that computer controlled figuring can be realized using dwelling time as a control parameter.…”