Compound optics such as lens systems can overcome the limitations concerning resolution, efficiency, or aberrations which fabrication constraints would impose on any single optical element. In this work we demonstrate unprecedented sub-5 nm point focusing of hard x-rays, based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP) for ultra-short focal length f. The pre-focusing allows limiting the MZP radius to below 2 μm, compatible with the required 5 nm structure width and essentially unlimited aspect ratios, provided by enabling fabrication technology based on pulsed laser deposition (PLD) and focused ion beam (FIB).

Propagation-based phase-contrast X-ray imaging is by now a well established imaging technique, which – as a full-field technique – is particularly useful for tomography applications. Since it can be implemented with synchrotron radiation and at laboratory micro-focus sources, it covers a wide range of applications. A limiting factor in its development has been the phase-retrieval step, which was often performed using methods with a limited regime of applicability, typically based on linearization. In this work, a much larger set of algorithms, which covers a wide range of cases (experimental parameters, objects and constraints), is compiled into a single toolbox – the HoloTomoToolbox – which is made publicly available. Importantly, the unified structure of the implemented phase-retrieval functions facilitates their use and performance test on different experimental data.

We illustrate the errors inherent in the conventional empty beam correction of full field X-ray propagation imaging, i.e. the division of intensities in the detection plane measured with an object in the beam by the intensity pattern measured without the object, i.e. the empty beam intensity pattern. The error of this conventional approximation is controlled by the ratio of the source size to the smallest feature in the object, as is shown by numerical simulation. In a second step, we investigate how to overcome the flawed empty beam division by simultaneous reconstruction of the probing wavefront (probe) and of the object, based on measurements in several detection planes (multi-projection approach). The algorithmic scheme is demonstrated numerically and experimentally, using the defocus wavefront of the hard X-ray nanoprobe setup at the European Synchrotron Radiation Facility (ESRF).

Image reconstruction of in-line holography depends crucially on the probing wave front used to illuminate an object. Aberrations inherent to the illumination can mix with the features imposed by the object. Conventional raw data processing methods rely on the division of the measured hologram by the intensity profile of the probe and are not able to fully eliminate artifacts caused by the illumination. Here we present a generalized ptychography approach to simultaneously reconstruct object and probe in the optical near-field. Combining the ideas of ptychographic lateral shifts of the object with variations of the propagation distance by longitudinal shifts, simultaneous reconstruction of object and probe was achieved equally well for a highly aberrated and a mildly disturbed probe without the need for an additional wave front diffuser. The method overcomes the image deterioration by a non-ideal probe and at the same time any restrictions due to linearization of the object's transmission function or the Fresnel propagator. The method is demonstrated experimentally using visible light and hard x-rays, in both parallel beam and cone beam geometry, which is relevant for high resolution x-ray imaging. It also opens up a new approach to characterize extended wave fronts by phase retrieval.

Full field x-ray propagation imaging can be severely deteriorated by wave front aberrations. Here we present an extension of ptychographic phase retrieval with simultaneous probe and object reconstruction suitable for the near-field diffractive imaging setting. Update equations used to iteratively solve the phase problem from a set of near-field images in view of reconstruction both object and probe are derived. The algorithm is tested based on numerical simulations including photon shot noise. The results indicate that the approach provides an efficient way to overcome restrictive idealizations of the illumination wave in the near-field (propagation) imaging.

Extended wavefronts are used for coherent full field imaging of objects based on solving the inverse Fresnel diffraction problem. To this end, the conventional data correction step is given by division of the recorded object image by the intensity pattern of the empty beam. This division of intensities in the detection plane is a rather crude approximation for the separation of the complex valued object and probing fields. Here we present a quantitative error estimate, along with its mathematical proof, and confirm the prediction with numerical simulations. Finally the problem is illustrated with experimental results. PACS number(s): 42.40.−i, 42.30.Wb, 87.59.−e u 0 (r ) := u(r ,0) = ι(r ,0)O(r ), r = (x,y) ∈ R 2 .

X-ray microscopy is a successful technique with applications in several key fields. Fresnel zone plates (FZPs) have been the optical elements driving its success, especially in the soft X-ray range. However, focusing of hard X-rays via FZPs remains a challenge. It is demonstrated here, that two multilayer type FZPs, delivered from the same multilayer deposit, focus both hard and soft X-rays with high fidelity. The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm FWHM (fullpitch) resolution at 7.9 keV, deduced from autocorrelation analysis. Reported FZPs had more than 10% diffraction efficiency near 1.5 keV. ©2014 Optical Society of AmericaOCIS codes: (340.7460) X-ray microscopy; (340.0340) X-ray optics; (340.6720) Synchrotron radiation; (340.7480) X-rays, soft x-rays, extreme ultraviolet (EUV); (050.1965) Diffractive lenses; (220.4241) Nanostructure fabrication. References and links1. J. Vila-Comamala, Y. Pan, J. J. Lombardo, W. M. Harris, W. K. S. Chiu, C. David, and Y. Wang, "Zonedoubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy," J. Synchrotron Radiat. 19(5), 705-709 (2012). 2. E. Zschech, C. Wyon, C. E. Murray, and G. Schneider, "Devices, materials, and processes for nanoelectronics: characterization with advanced x-ray techniques using lab-based and synchrotron radiation sources," Adv. Eng. Mater. 13(8), 811-836 (2011 Schütz, "Fast spin-wave-mediated magnetic vortex core reversal," Phys. Rev. B 86(13), 134426 (2012). 5. J. Kirz and C. Jacobsen, "The history and future of X-ray microscopy," J. Phys. Conf. Ser. 186, 012001 (2009). 6. P. Kirkpatrick and A. V. Baez, "Formation of optical images by X-Rays," J. Opt. Soc. Am. 38(9), 766-774 (1948 International Journal of Optics 31(4), 403-413 (1984). 46. A. A. Michelson, Studies in Optics (Dover Publications, Incorporated, 1995. 47. G. R. Morrison, "Phase contrast and darkfield imaging in x-ray microscopy," Proc. SPIE 1741, 186-193 (1993).

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