2013
DOI: 10.7567/jjap.52.118002
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10 Gbps Operation of Top Air-Clad Lateral Junction Waveguide-Type Photodiodes

Abstract: Toward on-chip photonic integrated circuits (PICs) based on a membrane structure, a lateral junction waveguide-type photodiode fabricated on semi-insulating (SI-) InP substrate was successfully demonstrated. A responsivity of 0.39 A/W was obtained by adopting a bulk GaInAs absorption layer. In addition, a narrow stripe width of 0.85 µm was chosen for the realization of high-speed operation. As a result, a 3 dB bandwidth of 8.8 GHz at a bias voltage of -2 V was attained for a device length of 380 µm, and a clea… Show more

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Cited by 5 publications
(1 citation statement)
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“…Subsequently, the PD was improved by replacing the MQW structure with a GaInAs bulk absorber. 11) The absorber volume is reduced owing to the larger material absorption coefficient of GaInAs. Nevertheless, leakage of the input light into the bottom SI-InP substrate remains an obstacle to increasing the responsivity.…”
mentioning
confidence: 99%
“…Subsequently, the PD was improved by replacing the MQW structure with a GaInAs bulk absorber. 11) The absorber volume is reduced owing to the larger material absorption coefficient of GaInAs. Nevertheless, leakage of the input light into the bottom SI-InP substrate remains an obstacle to increasing the responsivity.…”
mentioning
confidence: 99%