The possibility of quantitative estimation of the film thickness using cationic composition data, obtained by the INCA Energy-350 energy dispersive spectrometer which is integrated in electron microscope the JSM-6490 LV has been revealed. The application of this method is especially important in the case when the SEM image has insufficient contrast between of the film and substrate regions.
In a series of epitaxial La0.8Sr0.2MnO3- films 12–75 nm thick on NdGaO3 substrates, the variation in the oxygen content during heat treatment in air at temperatures of 873–1073 K was quantitatively studied. Experimental and calculated time dependences of the change in the oxygen content in films with taking into account the effect of inhomogeneous diffusion of oxygen over the thickness of the films, allowing to make the optimal choice of temperature and duration of the heat treatment procedure. In films 25–75 nm thick, the effect of “stabilization” of the oxygen content is observed, which indicates the presence of an energy barrier that prevents the incorporation of an excess oxygen atom into the surface layer of the film under optimal conditions of heat treatment.
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