Оценка Толщины Тонких Пленок На Основе Данных Элементного Состава Пленочных Структур

Николаенко, Ю.М.; Корнеевец, А.С.; Эфрос, Н.Б.; Бурховецкий, В.В.; Решидова, И.Ю.

doi:10.21883/pjtf.2019.13.47958.17743

Cited by 3 publications

(2 citation statements)

References 2 publications

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“…Состав пленок контролировался с помощью энергодисперсионного спектрометра INCA Energy-350. Толщина пленок контролировалась несколькими методами, включая оригинальный [16], основанный на вычислении толщины по относительному содержанию разнородных катионов в пленке и в микроскопическом слое подложки. Для устранения кислородного дефицита пленки подвергались пошаговой термообработке на воздухе.…”

Section: экспериментальные деталиunclassified

Эффект "стабилизации" кислородного содержания в пленках La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- при термообработке на воздухе

Николаенко¹,

Эфрос²,

Федюк³

et al. 2022

Физика Твердого Тела

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In a series of epitaxial La0.8Sr0.2MnO3- films 12–75 nm thick on NdGaO3 substrates, the variation in the oxygen content during heat treatment in air at temperatures of 873–1073 K was quantitatively studied. Experimental and calculated time dependences of the change in the oxygen content in films with taking into account the effect of inhomogeneous diffusion of oxygen over the thickness of the films, allowing to make the optimal choice of temperature and duration of the heat treatment procedure. In films 25–75 nm thick, the effect of “stabilization” of the oxygen content is observed, which indicates the presence of an energy barrier that prevents the incorporation of an excess oxygen atom into the surface layer of the film under optimal conditions of heat treatment.

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Section: экспериментальные деталиunclassified

Эффект "стабилизации" кислородного содержания в пленках La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- при термообработке на воздухе

Николаенко¹,

Эфрос²,

Федюк³

et al. 2022

Физика Твердого Тела

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“…Время нане-сения пленок варьировалось в пределах от 5 до 30 min. Толщина пленок контролировалась несколькими методами, включая развитый авторами метод оценки толщины на основе данных энергодисперсионного спектрометра INCA Energy-350, входящего в состав электронного микроскопа JSM-6490-LV [24].…”

Section: экспериментальные деталиunclassified

Диффузия кислорода в La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- пленках разной толщины на NdGaO-=SUB=-3-=/SUB=--подложках

Николаенко¹,

Efros²,

Artemov³

2021

Журнал Технической Физики

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The results of investigation by the indirect method of step-by-step varying the oxygen content in the series of epitaxial La0.8Sr0.2Mn3- films on single-crystal NdGaO3 substrates are presented. Using numerical simulation we have revealed that the oxygen diffusion coefficient significantly decreases along the film thickness in the direction from the outer surface to the film-substrate interface under conditions of "compressive" mechanical stresses caused by the mismatch of the in-plane crystalline parameters of the film and substrate materials. In films of d≈12—75 nm thickness, the effect is manifested in the fact that the value of the diffusion coefficient in the vicinity of the outer surface of the films also decreases significantly as the thickness of the films decreases. The questions of the applicability of the indirect method for evaluating the oxygen content in thin epitaxial films, as well as other manifestations of effects caused by mechanical stresses are discussed.

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The Potential of Liquid Glass Using for Smoothing the Surface of Optical Elements

Mikhaylenko,

Zorina,

Petrova

et al. 2023

Poverhnostʹ. Rentgenovskie, sinhrotronnye i nejtronnye issledov

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It is proposed to use “liquid glasses” of different compositions as substrates for space-based X-ray optical elements. One of the main requirements for such materials is the smallest mass and the possibility of surface treatment. Special requirements are imposed on the surface roughness, which must be less than 1 nm, and the shape accuracy should be at the level of units of nanometers. It is proposed to use a class of compounds based on alkali metal silicates or strong organic bases as a material, which allows forming the required shape and roughness, as well as providing subsequent treatment. The effect of smoothing the surface roughness of liquid glasses of three different compositions deposited on chromium and nickel films has been studied. Before and after the deposition of the structures, the roughness of all surfaces has been studied using an atomic force microscope. The roughness has been calculated using the power spectral density function (PSD function). The structures deposited on the surface, were irradiated with accelerated argon ions with an energy of 800 eV. The etch depth and effective roughness have been measured. One of the studied compositions has demonstrated a satisfactory reduction in roughness and the stability of this effect during ion etching.

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Оценка Толщины Тонких Пленок На Основе Данных Элементного Состава Пленочных Структур

Cited by 3 publications

References 2 publications

Эффект "стабилизации" кислородного содержания в пленках La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- при термообработке на воздухе

Эффект "стабилизации" кислородного содержания в пленках La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- при термообработке на воздухе

Диффузия кислорода в La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- пленках разной толщины на NdGaO-=SUB=-3-=/SUB=--подложках

The Potential of Liquid Glass Using for Smoothing the Surface of Optical Elements

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