A theoretical model of a large-area planar plasma producer based on surface wave (SW) propagation in a plasma-metal structure with a dielectric sheath is presented. The SW which produces and sustains the microwave gas discharge in the planar structure propagates along an external magnetic field and possesses an eigenfrequency within the range between electron cyclotron and electron plasma frequencies. The spatial distributions of the produced plasma density, electromagnetic fields, energy flow density, phase velocity and reverse skin depth of the SW are obtained analytically and numerically.
The dispersion properties and electromagnetic field topography of surface waves propagating along and in the azimuthal direction with respect to a cylindrical metal antenna immersed in a magneto-active plasma are investigated. The external magnetic field is directed along the antenna axis. The presence of a vacuum-gap sheath region separating the antenna from the plasma is assumed. The sheathless case is also considered. The dependence of the surface-wave dispersion properties on magnetic field intensity, plasma density, antenna radius and sheath thickness is presented for structure parameters close to experimental data. The results show qualitative agreement between our theory and experiment. The antenna surface impedance is calculated as well.
In this study, we demonstrate the role of a titanium hafnium oxide (TiHfO) gate dielectric in improving the overall electronic performance of a ZnO thin-film transistor (TFT). Ti x Hf 1Àx O (x ¼ 0:63) was fabricated by the rf co-sputtering technique. Using TiHfO as the gate dielectric, the device fabricated in this study exhibits a threshold voltage of 0.34 V, a subthreshold swing of 0.23 V/dec, a field-effect mobility of 2.1 cm 2 V À1 s À1 , and an ON/OFF current ratio of 10 5 . The small subthreshold swing and low positive threshold voltage are attributed to the higher value of of 40 for the dielectric. This result enables device operation below 2 V, allowing its use in low-power driving circuits in display applications.
The structure of a microwave gas discharge produced and sustained
by a surface wave (SW) propagating along a cylindrical metal antenna with a
dielectric coating is studied. The SW that produces and sustains
the microwave gas discharge propagates along an external magnetic field
and has an eigenfrequency in the range between the electron cyclotron
and electron plasma
frequencies. The presence of a dielectric (vacuum) sheath region
separating the
antenna from the plasma is assumed. The spatial distributions of
the produced plasma density, electromagnetic fields, energy flow density,
phase velocity and
reverse skin depth of the SW are obtained analytically and numerically.
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