Single-mode lasing at room temperature in quantum-cascade lasers (QCLs) with arched cavity design has been demonstrated. The output optical power in single-mode lasing regime at ~7.7-μm lasing wavelength was above 6 mW with a side-mode suppression ratio of up to 25 dB. The QCL heterostructure for the arched cavities was grown by molecular-beam epitaxy (MBE) based on a heterojunction of In_0.53Ga_0.47As/Al_0.48In_0.52As solid alloys, lattice-matched with InP substrate, and InP layers performing the function of waveguide claddings.
In this paper we present the study of the features of epitaxial growth highly stressed superlattices based on highly stressed thin InGaAs/InAlAs layers on InP substrates by the molecular beam epitaxy. It was shown that the growth rates of the InGaAs and InAlAs bulk layers lattice-matched to InP substrates do not allow us to precisely determine the growth rates of thin highly stressed InAlAs/InGaAs strain compensated superlattices and the error is about 10 percent. The effect is related to the difference in the growth temperatures of InGaAs and InAlAs bulk layers, which affects the intensity of indium evaporation from the growth surface.
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