Lithium phosphorus oxynitride (LiPON) has been widely used as the solid-state electrolyte for all-solid-state thin-film battery (ASSTFB) since firstly synthesized in 1992 due to its outstanding electrochemical and mechanical properties. This review summarizes the research and progress in ASSTFBs based on LiPON. Various LiPON-derivatives with adjustable chemical compositions of the amorphous structure have been developed to improve the ionic conductivity and electrochemical stability, they are detailed in this review. The investigations on the interface between LiPON/electrodes to perfect the overall properties of ASSTFBs are summarized. All kinds of physical and chemical preparation methods for LiPON with different characteristics are also described.
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