2022
DOI: 10.1088/2752-5724/ac7db2
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All-solid-state thin-film batteries based on lithium phosphorus oxynitrides

Abstract: Lithium phosphorus oxynitride (LiPON) has been widely used as the solid-state electrolyte for all-solid-state thin-film battery (ASSTFB) since firstly synthesized in 1992 due to its outstanding electrochemical and mechanical properties. This review summarizes the research and progress in ASSTFBs based on LiPON. Various LiPON-derivatives with adjustable chemical compositions of the amorphous structure have been developed to improve the ionic conductivity and electrochemical stability, they are detailed in this … Show more

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Cited by 12 publications
(8 citation statements)
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“…The well-recovered LiPON/Li interface in the R-TFB may be attributed to the following aspects. (1) According to previous reports 30,31 , there exists a fully dense layer containing Li3PO4, Li3N, and Li2O at the surface of recycled LiPON due to the decomposition reaction between LiPON and Li, which is ionically conductive and can shield the recycled LiPON electrolyte from severe decomposition and contamination during the recycling process 32…”
Section: Resultsmentioning
confidence: 95%
“…The well-recovered LiPON/Li interface in the R-TFB may be attributed to the following aspects. (1) According to previous reports 30,31 , there exists a fully dense layer containing Li3PO4, Li3N, and Li2O at the surface of recycled LiPON due to the decomposition reaction between LiPON and Li, which is ionically conductive and can shield the recycled LiPON electrolyte from severe decomposition and contamination during the recycling process 32…”
Section: Resultsmentioning
confidence: 95%
“…The LiPON was sputtered using a Li 3 PO 4 target under N 2 atmosphere at 298 K. During the RF magnetron sputtering process, the introduced N 2 gas was split into nitrogen ions and electrons under the high electric field, resulting in a reactive nitrogen cation species. The ionized N species can react with the Li-P-O species to form LiPON 45 , 46 . As shown in the cross-section FESEM image of the solid-state battery (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Table 6 summaries the selected data for solid-state batteries presented in the literature [ 38 , 39 , 40 , 41 , 42 ] which contain electrolytes of nanocomposites or similar materials and the results of this work for quick reference.…”
Section: Resultsmentioning
confidence: 99%
“…Review [ 40 ] describes the lithium phosphorus oxygen nitrogen (LiPON) as solid electrolyte with poor interface with the electrode. There are many preparation methods of the best LiPON.…”
Section: Resultsmentioning
confidence: 99%