Copper is deposited on TaN and WN barrier layers by electroless plating without the need for activation preprocessing when substrates are ͑i͒ pretreated by wet chemical etching to remove surface oxides, and ͑ii͒ immersed in an electroless Cu plating solution containing glyoxylic acid as a reducing agent. Electrical potential measurements indicate that the redox potentials of TaN and WN in the plating solution are lower than that of copper, driving displacement plating of Cu in the initial stage of deposition. The adhesion between electroless-plated Cu and the TaN barrier layer after annealing is 0.11 kgf/cm as determined by a peeling test, which is sufficient for reliability during chemical mechanical polishing. A damascene Cu interconnect was successfully fabricated without delamination and exhibited an electrical resistivity of 2.2 ⍀ cm after annealing for a 0.42 m wide interconnect track. These results indicate that the proposed electroless process is suitable for the formation of a Cu seed layer prior to electrodeposition for the fabrication of ultralarge scale integrated interconnects.

Dose-response of an induction of a germline mutation was studied at a hypervariable mouse minisatellite locus, Ms6hm, which consists of tandem repeats of a sequence motif GGGCA. Male C3H/HeN mice were exposed to various doses of 60Co gamma-ray and mated with unirradiated C57BL/6N female mice. Matings were done at various time after irradiation to assess the effects of radiation on spermatozoa, spermatids and spermatogonia. DNA samples of F1 offsprings were analysed by Southern blotting for the repeat length mutation at the Ms6hm locus. The mutation frequency per gamete of the paternal allele was 9.1% for the unirradiated control group. The spermatids stage was most sensitive to radiation and a statistically significant dose-response was observed. The mutation frequency of the paternal allele in F1 mice increased to 22% for 1 Gy, 28% for 2 Gy, and 28% for 3 Gy. The spermatogonia stage was less sensitive to radiation, and the mutation frequencies of the paternal allele were 14% for 2 Gy, and 16% for 3 Gy. The spermatozoa stage germ cells were also less sensitive and the frequency of mutation of the paternal allele increased to 14% for 3 Gy. However, these increases were statistically not significant. Possible mechanisms of radiation induction of germline mutation at the hypervariable minisatellite locus will be discussed.

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