FeCoN soft magnetic thin films with various nitrogen contents were fabricated by varying the gas flow rates of the argon and nitrogen gas mixture used during reactive rf magnetron sputtering. It was found that the resistivity of FeCoN film increased up to 211 μΩ cm with increasing nitrogen content. The film produced at the gas flow rate of 7 sccm exhibited the best soft magnetic properties with small coercivity and relatively large saturation magnetization. The microstructure of the films was examined by high-resolution transmission electron microscopy and α″-FeCo phase with very high saturation magnetization was observed in the films. The high-frequency properties of the FeCoN thin films were experimentally characterized and theoretically examined. The Hoffmann’s ripple theory was used to explain the permeability spectra for the films with strong magnetization dispersion. We found that the ripple effect is responsible for the large damping in the films, and those films with larger coercivities have stronger magnetization dispersion. With the gas flow rate of the argon and nitrogen gas mixture increasing from 0 to 15 sccm, the low-frequency permeability decreased from 680 to 245 and the ferromagnetic resonance frequency increased from 2.09 to 2.99 GHz.
The FeTaN thin films were deposited on the flexible plastic substrates by rf magnetron sputtering. Good soft magnetic properties with coercivity Ͻ10 Oe have been obtained in the films with thickness Ͻ250 nm. Relatively high values of the complex permeability and ferromagnetic resonance frequency were obtained and they can be adjusted by changing the film thickness. However, compared to the films on the rigid substrate, a decrease of the permeability level and a shift of the resonance peak in the permeability spectra have been noticed for the films on the flexible substrate. The electric properties, including sheet resistance, resistivity, and magnetoresistance for the films with various thicknesses, have also been investigated.
A cool-down step deposition process (multistep deposition with cool-down interval) was used to grow nanocomposite FeAlO thin films of various thicknesses up to 440nm by magnetron sputtering at a substrate temperature of 15°C. The effect of the number of cool-down steps on the soft magnetic properties and high frequency characteristics of the nanocomposite FeAlO films were investigated. The deposition process was proved very effective in improving the soft magnetic properties and high frequency characteristics of the films. The eight-layered samples, fabricated by eight cool-down step deposition process, of thicknesses of 220 and 440nm had obvious in-plane uniaxial anisotropies while the single-layered films were nearly isotropic. The resulting real permeability value of the eight-layered films was larger than 300 for the 220nm film and between 200 and 300 for the 440nm film.
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