Thickness-dependent properties of FeTaN thin films deposited on flexible substrate

Abstract

The FeTaN thin films were deposited on the flexible plastic substrates by rf magnetron sputtering. Good soft magnetic properties with coercivity Ͻ10 Oe have been obtained in the films with thickness Ͻ250 nm. Relatively high values of the complex permeability and ferromagnetic resonance frequency were obtained and they can be adjusted by changing the film thickness. However, compared to the films on the rigid substrate, a decrease of the permeability level and a shift of the resonance peak in the permeability spectra have been noticed for the films on the flexible substrate. The electric properties, including sheet resistance, resistivity, and magnetoresistance for the films with various thicknesses, have also been investigated.

Improving permanent magnetic properties of rapidly solidified nanophase RE–TM–B alloys by compositional modification

“…However, another transition metal, Ta has received little attention. Although Ta has been frequently employed in soft magnetic materials such as Fe or FeCo-based thin films or bulk metallic glass for improving thermal stability, high-frequency properties and glass formability [28][29][30], there have been very few reports on the effect of Ta doping on the structure and magnetic properties of RE-Fe-B nanocomposites.…”

Microstructure and thickness dependent magnetic properties of nanogranular Co–Zn–O thin films for microwave applications

“…Increase of Co concentration in Co:ZnO system will also lead to soft magnetic film. Following our previous work on the continuous FeTaN [10], FeZrN [11] films and granular CoAlO [12], CoFeSiN [13] films, here we report the structure and high frequency behavior of the CoZnO thin films with various thicknesses.…”

Ultrawide frequency linewidth of the permeability spectra of FeCoN thin film sputtered on the flexible substrate

“…The influence from the substrate is relatively weak in the case of thick multilayers and multilayer stacks, however, is expected to be strong in the case of single-layered thin films. Some previous studies have investigated the thickness dependences of films deposited on flexible substrates [18,19]. However, discussions on whether these flexible substrates can bring about magnetic ripples in the films and whether these substrates can be utilized for obtaining large Do r values are still lacking.…”

“…Therefore, usually, for the study of soft magnetic thin films, rigid substrates with polished surfaces are selected for deposition, such as single-crystalline Si substrate or polished glass substrate. However, for practical applications such as microwave filters and even absorbers, flexible plastic substrates, such as Kapton s (polyimide film: PI) and Mylar s (polyester film: PET) films, are widely used for the fabrication of soft magnetic thin films, multilayers and multilayer stacks [16][17][18], because of the advantages of their ultrathin thickness and flexibility. Due to the flexibility and polymer essence, the flexible substrate will inevitably bring some local inhomogeneities of magnetizations to the soft magnetic thin film deposited on it.…”