The authors demonstrate a unique low cost process to print 2D, submicron size, and high refractive index nanopillars using a direct colloidal-photolithography process. A well collimated i-line source emitting at 365 nm wavelength illuminates a mono layer of silica microspheres of 1 μm diameter deposited on a photosensitive TiO2-based sol-gel layer. No etching process is needed since this layer is directly UV photo patternable like a negative photoresist. Furthermore, this thin layer offers interesting optical properties (high refractive index and optical transparency) and good mechanical and chemical stability and thus can be directly used as a functional microstructure (for PV or sensor applications, for example). The paper describes the modeling of the electric field distribution below the spheres during the illumination process, the photochemistry of the TiO2 sol-gel layer process, and preliminary results of TiO2 nanopillars of around 200 nm in diameter fabricated on a three-inch substrate.
We report on the design, fabrication, and characterization of an all-dielectric one-dimensional (1D) resonant device formed by a silicon nitride grating impregnated by a low-index magneto-optical silica-type matrix. This impregnation is realized through the dipping of the 966 nm periodic template in a sol−gel solution previously doped with CoFe 2 O 4 nanoparticles, and able to fill the grating slits. By a proper adjustment of the geometrical parameters of such a photonic crystal membrane, simultaneous excitation of transverse electric (TE) and transverse magnetic (TM) polarization resonances is nearly achieved at 1570 nm. This TE/TM phase-matching situation leads to a fivefold enhancement of the Faraday effect in the resonance area with an increased merit factor of 0.32°. Moreover, the device demonstrates its ability to enhance longitudinal and transverse Kerr effects for the other directions of the applied magnetic field. Taking benefits from the ability of the nanocomposite material to be processed on photonic platforms, and despite its quite low magneto-optical activity compared to classical magnetic materials, this work proves that an alldielectric 1D device can produce a high magneto-optical sensitivity to every magnetic field directions.
The miniaturization of optical components to control and manipulate light amplitude, phase, and polarization requires micro-to nanostructured metasurfaces that provide resonant light−matter interactions to exploit optical properties in the visible and near-infrared (NIR) range (plasmonic resonances, wavelength filtering, etc.). Such metasurfaces sometimes need to be implemented under hard-use conditions, including high temperatures and strong field confinement. Transition-metal nitrides, like titanium nitride (TiN), are ideal materials to achieve such properties, but TiN's hardness and chemical inertness make patterning difficult. Here, we present an innovative direct fabrication process to easily synthesize a micro−nanostructured TiN thin film. The technological process is based on a direct photo-patternable titanium oxide TiO 2 sol−gel layer converted into TiN with a rapid thermal nitridation process. The nanoarchitecture and chemical composition of TiO 2 and TiN films were investigated by ultraviolet (UV)− visible−infrared (IR) spectroscopy and Raman spectroscopy, grazing incidence X-ray diffraction (GIXRD), and high-resolution transmission electron microscopy (HRTEM) coupled with electron energy loss spectroscopy (EELS). We obtained micro−nanotextured crystallized TiN surfaces in a significantly shorter time than with conventional nitridation processes. Due to the sol−gel approach, this work also significantly extends the chances of obtaining TiNbased metasurfaces on various substrates (glasses, plastics, etc.) in complex shapes (non-planar-based surfaces), for demanding photonic applications in the future.
Surface plasmon coupling of a TM polarized free space incident beam by means of the + 1st or the -2nd order of a smooth corrugation grating at a metal surface causes the cancellation of the diffracted -1st order free space beam and a maximum of the 0th order Fresnel reflection whereas the converse occurs midway between these two conditions. This implies that angular tilting of the element or wavelength scanning provokes the switching between the -1st and 0th reflected orders. This plasmon-mediated effect on propagating free-space beams exhibits remarkably low absorption losses.
This study reports the optical, electrical and mechanical properties of TiN films prepared by direct rapid thermal nitridation process from a photo-patternable TiO 2 sol-gel layer. The sol-gel approach is compatible to non-planar and large substrates and allows the micro-nanotexturing of crystallized TiN surfaces in a significantly short time, large scale and at a lower cost compared to TiN layer deposition from existing and conventional processes (CVD, PVD, ALD…). In this paper, the optical measurements are carried out by optical spectroscopy in the UV, visible and near-IR region and by ellipsometry. The resistivity and the conductivity are estimated by four-point probe method, while hardness is characterized by nano-indentation experiments. The results indicate that the TiN thin film made by sol-gel method and rapid thermal nitridation are very promising for the manufacturing of optical metasurfaces devices or new plasmonic materials.
International audienceThe well known resonant or extraordinary transmission through an undulated metallic thin film embedded in a dielectric layer using the Plasmon modes excitation under normal incidence is industrially exploited for document protection applications. While the effect is very spectrally sensitive to the incidence angle in collinear incidence since it leads to a transmission peak separation in two peaks, it is very tolerant in conical incidence (incidence angle in the plan normal to the grating direction). This property is used to create color transmission effects by playing with the sample rotation in the two directions to enhance the contrast of such effect. Theoretical approach, modeling and experimental demonstration in the visible range on a flexible plastic foil are presented for a see-through window implemented in document security
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