To start a step such as some realization of minimized and integrated devices, it requires simply understanding the surface status of hybrid perovskite on the e-beam irradiation because many commercial semiconductor devices are performed with a surface patterning process using e-beam or etching gas. The surface status of CH3NH3PbBr3 (MAPbBr3) single crystal was studied after a grazing e-beam irradiation in an ultra-high vacuum. The prepared hybrid perovskite single crystal was irradiated by the 3 degree-grazing e-beam with energy of 15 kV for 10 min using a reflection high-electron energy diffraction technique. The e-beam irradiation on the MAPbBr3 hybrid perovskite single crystal induced the deformation from MAPbBr3 into MABr, Br2, and Pb on the surface. The gas phases of MABr and Br2 are depleted from the surface and the Pb element has remained on the surface. As a result of the e-beam irradiation, it formed a polycrystalline-like phase and Pb metal particles on the surface, respectively.
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