In this study, the high dielectric constant of the polymer/ceramic composites is used to fabricate capacitive substrates. The reliability and failure analysis of the capacitive substrate under temperature and voltage stress have been studied. The mean time to failure (MTTF) of the capacitive substrate shows a voltage exponent value dependence on applied voltage with a constant of ~3.3 as the measurement temperature at 175 o C. The lifetime also indicates a temperature dependence of the MTTF with an activation energy of 1.2 eV in the temperature range of 125 o C to 175 o C under dc bias of 300 VDC. The failed samples exhibited a rapid increase leakage current indicating avalanche breakdown. Moreover, it is also shown that the failed samples have a decrease in the insulation resistance and capacitance value and an increase in dissipation factor, equivalent series resistance, reactance and impedance value.
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