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The results of studying the accumulation and thermal desorption of ion implanted deuterium from tungsten films deposited on various composite substrates are presented. The influence of the tungsten film thickness and irradiation dose with D + ions of intermediate energy on the amount of trapped deuterium and the shape of the spectra of the thermal desorption of deuterium in vacuum are studied. Possible mecha nisms of these processes are discussed.

The paper is the result of investigations the authors of initial stages of hydrogen isotope retention and migration, formation of radiation damages of lattice in the constructive materials irradiated wich H+/D+ ions. The studies methods were thermal desorption spectroscopy (TDS) combined with electron microscopy (TEM and SEM) and electrical resistance measurements. Deuterium retention was studied as a function of ion fluence, implantation temperature, incident ions energy and pre-implantation by He+ ions. Special attention was given to the investigation of thin films of constructive metals irradiated with D+ ions with the range greater than the film thickness. Also the trapping of deuterium in thin metallic films was investigated at D+ ions implantation (the range was comparable with the film thickness). Possible mechanisms are proposed to describe the observed processes.

The processes of helium accumulation and thermal desorption for tungsten and tantalum coatings deposited on a stainless-steel substrate with an intermediate titanium layer were studied at various temperatures of the samples when irradiated with He+ ions to various fluences. The dependences of the concentration of captured helium and the form of the spectra of its thermal desorption into vacuum were found both on the fluence of He+ ions and on the temperature of the samples upon irradiation. Possible mechanisms for the accumulation and thermal desorption of helium, as well as the formation of defects in the crystal lattice of the samples, are discussed.

The capture, retention, and thermal desorption of deuterium and helium ions with medium energies implanted into tungsten-coated multilayer functional structures and the formation of corresponding radiation-induced damages in the crystal lattice of the tungsten coatings of those structures have been studied making use of the thermal desorption spectroscopy and electron microscopy methods. The behavior of deuterium and helium in the examined materials and its dependence on the post-implantation heating temperature, the dose of irradiation with D+ and He+ ions, and the irradiation condition – separate (making use of ions of only one kind) or sequential (making use of ions of both kinds) – are analyzed. A classification of radiation-induced defects and mechanisms of their annealing are proposed.

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