This paper describes a compact resistor-based temperature sensor intended for the thermal monitoring of microprocessors and DRAMs. It consists of an RC poly-phase filter (PPF) that is read out by a frequency-locked loop (FLL) based on a dual zero-crossing (ZC) detection scheme. The sensor, fabricated in 65 nm CMOS, occupies 5800 μm 2 and achieves moderate accuracy (±1.2 °C (3σ) inaccuracy) over a wide temperature range (−50 to 105 °C) after a one-point trim. This is 2 better than previous compact resistor-based sensors. Operating from 0.85 to 1.3 V supplies, it consumes 32.5 μA and achieves 2.8 mK resolution in a 1-ms conversion time, which corresponds to a resolution FoM of 0.26 pJ•K 2 .
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