A 5800-$\mu$ m₂ Resistor-Based Temperature Sensor With a One-Point Trimmed Inaccuracy of ±1.2 °C ($3\sigma$ ) From −50 °C to 105 °C in 65-nm CMOS

Abstract

This paper describes a compact resistor-based temperature sensor intended for the thermal monitoring of microprocessors and DRAMs. It consists of an RC poly-phase filter (PPF) that is read out by a frequency-locked loop (FLL) based on a dual zero-crossing (ZC) detection scheme. The sensor, fabricated in 65 nm CMOS, occupies 5800 μm 2 and achieves moderate accuracy (±1.2 °C (3σ) inaccuracy) over a wide temperature range (−50 to 105 °C) after a one-point trim. This is 2 better than previous compact resistor-based sensors. Operating from 0.85 to 1.3 V supplies, it consumes 32.5 μA and achieves 2.8 mK resolution in a 1-ms conversion time, which corresponds to a resolution FoM of 0.26 pJ•K 2 .

A 840-<i>µm</i>² low-power all-MOS temperature sensor front-end with real-time voltage calibration

“…While conventional temperature sensors based on BJT or resistors offer excellent precision, they tend to occupy significant chip area and consume high levels of power, making them less desirable for SoC design [8][9][10][11][12][13][14][15][16][17]. Furthermore, reducing their area and power consumption through process upgrades is challenging.…”