Microdischarges at atmospheric pressure were studied by two computational methods. The first method is a typical one-dimensional fluid model in which the electron velocity distribution function is assumed to be Maxwellian and the energy equation is solved to determine the spatial profile of the electron temperature. The second method is a particle-in-cell (PIC) model with Monte-Carlo collisions (MCC). We compared the time-averaged density, electric field and power consumption profiles of helium microdischarges driven at 13.56 MHz and 2.45 GHz obtained with the two models. The agreement between the two models depends on the driving frequency. The kinetic information obtained from the PIC-MCC model indicates that the improved agreement at higher frequency is due to the evolution of the electron energy distribution function from a three-temperature distribution at 13.56 MHz to a close-to-Maxwellian distribution at 2.45 GHz.
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