In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002∘ in the whole measurement range from 0∘ to 360∘.
The coal-bed methane (CBM) as a kind energy is clean and efficient, also it can become a security risk in mining process if it could not get out of the coal seam. In view of the current large-scale exploitation of coal-bed methane resources, the development of drilling rig for CBM drilling is needed. The parameters and structures were introduced in the paper. The rig uses a highly integrated approach that integrates the required functions on the chassis of the vehicle to meet the needs of rapid installation and transportation. Drilling control system uses hydraulic control and electro-hydraulic control dual control mode, can achieve short-range and remote control operations. The control system include security circuits and electric control system. Through the field trial, it is shown that the rig can meet the construction of the majority of coalbed methane drilling in the country and the performance is stable and the operation is simple.
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