A high resolution tilt measurement system based on multi-accelerometers

Weng, Yinsheng; Wang, Shudong; Zhang, Hongcai; Gu, Hairong; Wei, Xueyong

doi:10.1016/j.measurement.2017.05.058

Cited by 21 publications

(7 citation statements)

References 16 publications

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“…Enfu Li et al achieved a tilt sensor with a high resolution maintained in the full measurement range based on one dual-axis micro-accelerometer [ 20 ]. In our previous work, we built a tilt measurement system based on three accelerometers, whose resolution is

[ 3 ]. In this work, we will integrate three sensing elements in MEMS process, and propose a MEMS tilt sensor with a smaller size, and a better performance.…”

Section: Sensing Principle and Structure Designmentioning

confidence: 99%

“…It has been utilized in somatic games, remote health monitoring for large structures, inertial navigations and etc. Therefore, many research groups are devoted to improve the performance of tilt sensors and related measuring systems [ 1 , 2 , 3 ]. Particularly, since the rapid development of MEMS technology, many kinds of sensors have been revolutionized and enabled a smaller dimension, a better performance and a lower price, leading to a rapid increase in the market share of sensors based on MEMS technology.…”

Section: Introductionmentioning

confidence: 99%

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A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

Wang

Wei

Weng

et al. 2018

Sensors

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In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is 0.002∘ in the whole measurement range from 0∘ to 360∘.

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[ 3 ]. In this work, we will integrate three sensing elements in MEMS process, and propose a MEMS tilt sensor with a smaller size, and a better performance.…”

Section: Sensing Principle and Structure Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

Wang

Wei

Weng

et al. 2018

Sensors

Self Cite

View full text Add to dashboard Cite

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“…Another category of sensors used for bend measurements is the inertial-based measuring devices including accelerometers and gyroscopes. Accelerometers can operate as tilt sensors and provide angle measurements down to 0.02° resolution under controlled conditions [ 26 ]. Gyroscopes measure angular velocity and are suited to dynamic measurements.…”

Section: Introductionmentioning

confidence: 99%

A Curvature Sensor Utilizing the Matteucci Effect in Amorphous Wire

Alimohammadi

Williams

Meydan

2023

Sensors

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The study of wearable sensors for human disease monitoring has developed into an important research area due to its potential for personalized health care. Various sensor types have been proposed for assessing the range of joint movement in patients with progressive diseases or following post-surgical treatments. Many of these methods suffer from poor accuracy, sensitivity, and linearity or are very expensive and complex to implement. To overcome some of these limitations, this paper reports on the development of a novel flexible sensor for the measurement of bending by utilizing the Matteucci effect in the amorphous wire. This paper describes a bend sensor that utilizes positive magnetostrictive amorphous wire to achieve a measurement sensitivity equal to 5.68 ± 0.02 mV/cm with a resolution of ±0.2° over a measuring range of 64 to 143°.

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“…The research on sensors of solid-based tilt angle has matured over the course of many applications. This kind of sensor consists of a proof mass suspended by a cantilever, spring, hinged bar or roller ball [5]- [9]. When the sensor body rotates around vertical or horizontal reference orientation, under the influence of the gravity, the suspended solid structure is deformed; this deformation is measured in terms of tilt angle.…”

Section: Introductionmentioning

confidence: 99%

“…This configuration is robust, highly accurate, and easy-to-build with inexpensive and commercially available electronics instead of research-grade tools. Although recent advanced Thickness of the glass wall microfabrication technology has reduced the cost and the size of the tilt sensor, the burden of the initial installment and prototyping could delay the transformation of a theoretical idea to a realistic production [9], [39]- [42]. The proposed sensor which has simple structure and is easy to be fabricated has been briefly presented in our previous work [43].…”

Section: Introductionmentioning

confidence: 99%

A Robust Two-axis Tilt Angle Sensor Based on Air/Liquid Two-phase Dielectric Capacitive Sensing Structure

Thuy¹,

Dinh

Quoc

et al. 2018

IETE Journal of Research

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This paper presents the design, fabrication, and characterization of a two-axis tilt angle sensor based on the dielectric liquid capacitive sensing structure. The sensor consists of five electrodes. One electrode serves as the exciting electrode and two pairs of electrodes as sensing electrodes, which are arranged at identical positions surrounding a glass cylinder tube, which is partly filled with dielectric liquid. Based on this unique arrangement, the proposed sensor can detect two components of tilt angle in x-axis and y-axis, simultaneously. A computational simulation and experimental measurements are performed to study the performance of the sensor. The numerical simulation is carried out with a finite element analysis using COMSOL. A prototype of the sensor was fabricated, and its performance was evaluated. The tilt angle sensor was employed on a printed circuit board with a conditioning circuit, which consisted of a 170 kHz sine wave generator, pre-amplifiers, rectifiers, and low pass filters. The experiment results confirmed that the tilt angle sensitivities to x-axis and y-axis are 18.2 mV/° and 58.2 mV/° respectively, with cross-axis sensitivity being less than 5.5% in the linear range. The measured tilt angle resolutions are 0.55° and 0.17° on the x-axis and y-axis respectively.

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A high resolution tilt measurement system based on multi-accelerometers

Cited by 21 publications

References 16 publications

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘

A Curvature Sensor Utilizing the Matteucci Effect in Amorphous Wire

A Robust Two-axis Tilt Angle Sensor Based on Air/Liquid Two-phase Dielectric Capacitive Sensing Structure

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