The growing maturity of nanofabrication has ushered massive sophisticated optical structures available on a photonic chip. The integration of subwavelength-structured metasurfaces and metamaterials on the canonical building block of optical waveguides is gradually reshaping the landscape of photonic integrated circuits, giving rise to numerous meta-waveguides with unprecedented strength in controlling guided electromagnetic waves. Here, we review recent advances in meta-structured waveguides that synergize various functional subwavelength photonic architectures with diverse waveguide platforms, such as dielectric or plasmonic waveguides and optical fibers. Foundational results and representative applications are comprehensively summarized. Brief physical models with explicit design tutorials, either physical intuition-based design methods or computer algorithms-based inverse designs, are cataloged as well. We highlight how meta-optics can infuse new degrees of freedom to waveguide-based devices and systems, by enhancing light-matter interaction strength to drastically boost device performance, or offering a versatile designer media for manipulating light in nanoscale to enable novel functionalities. We further discuss current challenges and outline emerging opportunities of this vibrant field for various applications in photonic integrated circuits, biomedical sensing, artificial intelligence and beyond.

Creating materials with time-variant properties is critical for breaking reciprocity that imposes fundamental limitations on wave propagation. However, it is challenging to realize efficient and ultrafast temporal modulation in a photonic system. Here, leveraging both spatial and temporal phase manipulation offered by an ultrathin nonlinear metasurface, we experimentally demonstrated nonreciprocal light reflection at wavelengths around 860 nm. The metasurface, with travelling-wave modulation upon nonlinear Kerr building blocks, creates spatial phase gradient and multi-terahertz temporal phase wobbling, which leads to unidirectional photonic transitions in both the momentum and energy spaces. We observed completely asymmetric reflections in forward and backward light propagations over a large bandwidth around 5.77 THz within a sub-wavelength interaction length of 150 nm. Our approach highlights a potential means for creating miniaturized and integratable nonreciprocal optical components.

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Metasurfaces with unparalleled controllability of light have shown great potential to revolutionize conventional optics. However, they mainly require external light excitation, which makes it difficult to fully integrate them on-chip. On the other hand, integrated photonics enables packing optical components densely on a chip, but it has limited free-space light controllability. Here, by dressing metasurfaces onto waveguides, we molded guided waves into any desired free-space modes to achieve complex free-space functions, such as out-of-plane beam deflection and focusing. This metasurface also breaks the degeneracy of clockwise- and counterclockwise-propagating whispering gallery modes in an active microring resonator, leading to on-chip direct orbital angular momentum lasing. Our study shows a viable route toward complete control of light across integrated photonics and free-space platforms and paves a way for creating multifunctional photonic integrated devices with agile access to free space, which enables a plethora of applications in communications, remote sensing, displays, etc.