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The growing maturity of nanofabrication has ushered massive sophisticated optical structures available on a photonic chip. The integration of subwavelength-structured metasurfaces and metamaterials on the canonical building block of optical waveguides is gradually reshaping the landscape of photonic integrated circuits, giving rise to numerous meta-waveguides with unprecedented strength in controlling guided electromagnetic waves. Here, we review recent advances in meta-structured waveguides that synergize various functional subwavelength photonic architectures with diverse waveguide platforms, such as dielectric or plasmonic waveguides and optical fibers. Foundational results and representative applications are comprehensively summarized. Brief physical models with explicit design tutorials, either physical intuition-based design methods or computer algorithms-based inverse designs, are cataloged as well. We highlight how meta-optics can infuse new degrees of freedom to waveguide-based devices and systems, by enhancing light-matter interaction strength to drastically boost device performance, or offering a versatile designer media for manipulating light in nanoscale to enable novel functionalities. We further discuss current challenges and outline emerging opportunities of this vibrant field for various applications in photonic integrated circuits, biomedical sensing, artificial intelligence and beyond.

Metasurfaces have found broad applicability in free-space optics, while its potential to tailor guided waves remains barely explored. By synergizing the Jones matrix model with generalized Snell’s law under the phase-matching condition, we propose a universal design strategy for versatile on-chip mode-selective coupling with polarization sensitivity, multiple working wavelengths, and high efficiency concurrently. The coupling direction, operation frequency, and excited mode type can be designed at will for arbitrary incident polarizations, outperforming previous technology that only works for specific polarizations and lacks versatile mode controllability. Here, using silicon-nanoantenna-patterned silicon-nitride photonic waveguides, we numerically demonstrate a set of chip-scale optical couplers around 1.55 μm, including mode-selective directional couplers with high coupling efficiency over 57% and directivity about 23 dB. Polarization and wavelength demultiplexer scenarios are also proposed with 67% maximum efficiency and an extinction ratio of 20 dB. Moreover, a chip-integrated twisted light generator, coupling free-space linear polarization into an optical vortex carrying 1 ℏ orbital angular momentum (OAM), is also reported to validate the mode-control flexibility. This comprehensive method may motivate compact wavelength/polarization (de)multiplexers, multifunctional mode converters, on-chip OAM generators for photonic integrated circuits, and high-speed optical telecommunications.

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A generalized family of scalar structured Gaussian modes including helical-Ince-Gaussian (HIG) and Hermite-Laguerre-Gaussian (HLG) beams is presented with physical insight upon a hybrid topological evolution nature of multi-singularity vortex beams carrying orbital angular momentum (OAM). Considering the physical origins of intrinsic coordinates aberration and the Gouy phase shift, a closed-form expression is derived to characterize the general modes in astigmatic optical systems. Moreover, a graphical representation, Singularities Hybrid Evolution Nature (SHEN) sphere, is proposed to visualize the topological evolution of the multi-singularity beams, accommodating HLG, HIG and other typical subfamilies as characteristic curves on the sphere surface. The salient properties of SHEN sphere for describing the precise singularities splitting phenomena, exotic structured light fields, and Gouy phase shift are illustrated with adequate experimental verifications.