Two-step field-assisted ion-exchanged waveguides have been fabricated on a glass substrate. The concentration profiles of the exchanged ions were measured with electron microprobe. The waveguides were characterized under scanning electron microscope and optical microscope for the investigation of burying structures. Guiding mode patterns were characterized with near-field measurement, where symmetric profiles were observed for the burying-type waveguide. The refractive index profiles were also measured with a modified end-fire coupling method. The relation between ion concentration profiles and index profiles were compared for the waveguides with different fabrication process.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.