Burying of channel optical waveguides: relation between near-field measurement and Ag concentration profile

Abstract

Two-step field-assisted ion-exchanged waveguides have been fabricated on a glass substrate. The concentration profiles of the exchanged ions were measured with electron microprobe. The waveguides were characterized under scanning electron microscope and optical microscope for the investigation of burying structures. Guiding mode patterns were characterized with near-field measurement, where symmetric profiles were observed for the burying-type waveguide. The refractive index profiles were also measured with a modified end-fire coupling method. The relation between ion concentration profiles and index profiles were compared for the waveguides with different fabrication process.