The kinetics of hydrogen plasma in an afterglow region has been
simulated to distinguish
remote plasma treatment from conventional (direct) plasma treatment.
A simulation shows the possibility
that remote hydrogen plasma treatment can enhance interaction reactions
with hydrogen radicals relative
to those with electron and hydrogen ions. Practically, hydrogen
substitution processes in the PTFE sheet
by remote and direct hydrogen plasma treatments have been investigated
by means of contact angle
measurement and XPS. The hydrogen plasma makes the surface of the
PTFE sheet hydrophilic. The
hydrophilicity depends on the sample position as well as the rf power
and the plasma exposure time.
The sample position strongly influences the hydrophilicity.
The remote hydrogen plasma leads to higher
hydrophilicity than the direct hydrogen plasma. The F/C atom ratio
for the remote hydrogen-plasma-treated PTFE sheet is 0.41 and that for the direct
hydrogen-plasma-treated PTFE sheet is 0.60. The
main product of the substitution atoms by remote and direct hydrogen
plasma treatments is a dihydrogen-substituted carbon unit and reaches 63% and 55% of the total carbon,
respectively. The substitution
proceeds at least 3.4 nm from the surface of the PTFE sheet.
Remote hydrogen plasma treatment
especially accomplishes complete substitution (the F/C atom ratio is
0). These experimental results show
the accuracy of the simulation regarding the kinetics of the remote
hydrogen plasma.
Surface modification of poly(p-phenylene terephthalamide) (PPTA) film by a remote oxygen plasma treatment has been investigated from a viewpoint of comparison with a direct oxygen plasma treatment. We call the modification procedure in a space far away from the oxygen plasma zone ''the remote oxygen plasma treatment,'' and the modification procedure in a space just in the oxygen plasma zone (a conventional oxygen plasma treatment) ''the direct oxygen plasma treatment.'' In a space far away from the plasma zone, oxygen radicals rather than electrons and oxygen ions are predominant, and the PPTA film can be modified by the remote oxygen plasma treatment into a hydrophilic surface without heavy degradation of the PPTA film. The PPTA film surfaces modified by the remote oxygen plasma treatment were analyzed with contact angle measurement, scanning microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy.
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