A B S T R A C T SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.
This study presents a complete set of effective elastic-stiffness coefficients of a Ni 80 P 20 amorphous-alloy thin film deposited on an aluminum-alloy substrate by electroless plating. The film thickness was 12 m. The electromagnetic-acoustic-resonance method detected resonance frequencies of the triple-layered specimens ͑film/substrate/film͒, which enabled us to determine all five independent elastic-stiffness coefficients of the film using known substrate elastic properties. The resulting coefficients were those of a transverse isotropic material. There was strong anisotropy between the in-plane and normal directions; the in-plane Young's modulus is larger than the normal Young's modulus by 34%, for example. The anisotropic coefficients can be interpreted by considering a micromechanics model for local incomplete cohesion ͑thin ellipsoidal voids͒ aligned parallel to the film surface.
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