In order to understand the nature of surface spoke patterns on silicon melt in industrial Czochralski furnaces, a series of unsteady three-dimensional numerical simulations were conducted for thermocapillary-buoyancy flow of silicon melt in annular pool (inner radius r i =15 mm, outer radius r o =50 mm, depth d=3mm). The pool is heated from the outer cylindrical wall and cooled at the inner wall. Bottom and top surfaces either are adiabatic or allow heat transfer in the vertical direction. Results show that a small temperature difference in the radial direction generates steady roll-cell thermocapillary-buoyancy flow. With large temperature difference, the simulation can predict three-dimensional oscillatory flow, which is characterized by spoke patterns traveling in the azimuthal direction. The small vertical heat flux (3W/cm 2 ) does not have significant effects on the characteristics of this oscillatory flow. Details of the flow and temperature disturbances are discussed and the critical conditions for the onset of the oscillatory flow are determined.
In order to understand the effects of the thermophysical properties of the melt on the transport phenomena in the Czochralski (Cz) furnace for the single crystal growth of silicon, a set of global analyses of momentum, heat and mass transfer in small Cz furnace (crucible diameter: 7.2 cm, crystal diameter: 3.5 cm, operated in a 10 Torr argon flow environment) was carried out using the finite-element method. The global analysis assumed a pseudosteady axisymmetric state with laminar flow. The results show that different thermophysical properties will bring different variations of the heater power, the deflection of the melt/crystal interface, the axial temperature gradient in the crystal on the center of the melt/crystal interface and the average oxygen concentration along the melt/crystal interface. The application of the axial magnetic field is insensitive to this effect. This analysis reveals the importance of the determination of the thermophysical property in numerical simulation.
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