We investigated the electronic properties of thermally oxidized Ni films using the optical spectroscopic technique and found that the optical properties of the NiO films exhibit systematic changes with oxidation degree in accord with structural and magnetic analysis results. We discuss our findings in relation to the doping to a Mott insulator and the inhomogeneous phase of a Ni(metal)–NiO(insulator) nano-composite.
The application of chemically amplified resist is known to cause a problem in the accurate measurement of the concentration of basic gas species ( NH3, N-methylpyrrolidone (NMP)) in a clean room environment because it is sensitive to its environment. Among various methods of measurement, diffusion scrubber sampling method was selected and tested. The environmental sensitivity of a commercial chemically amplified resist, APEX-E, was also tested. For the concentration measurement, the method proved to be suitable for automation and good for measuring NH3 concentration as low as the sub ppb level (limit of detection ∼0.08 ppb). Some measurement results concerning various aspects of application are presented. Test results of the environmental stability of chemically amplified resists showed that NH3 concentration should be controlled to at least under 7.5 ppb for maintaining the process stability.
CVD TiN using Tic14 and N€b chemistry has been implemented successllly in cylindncally shaped Tal03 storage capacitor as a bamer layer in poly-SiRiN double upper electrode. Electrical characteristics of TaZOs capacitor with CVD TiN double electrode were superior to that with PVD TiN and it was attributed to nearly 100% conformality of CVD TiN. However, it was also found that minimizing chlorine content in CVD TiN f i l m was essential to achieve low leakage current level, and in-situ post annealing of CVD TiN f i l m in N€% ambient was effective in reducing chIorine content.
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