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Cyber-physical systems (CPSs) have emerged as a potential enabling technology to handle the challenges in social and economic sustainable development. Since it was proposed in 2006, intensive research has been conducted, showing that the construction of a CPS is a hard and complex engineering process due to the nature of integrating a large number of heterogeneous subsystems. Among other approaches to dealing with the complex design issues, model-driven design of CPSs has shown its advantages. In this review paper, we present a survey of research on model-driven development of CPSs. We are concerned mainly with the widely used methods, techniques, and tools, and discuss how these are applied to CPSs. We also present comparative analyses on the surveyed techniques and tools from various perspectives, including their modeling languages, functionalities, and the challenges which they address in CPS design. With our understanding of the surveyed methods, we believe that model-driven approaches are an inevitable choice in building CPSs and further research effort is needed in the development of model-driven theories, techniques, and tools. We also argue that a unified modeling platform is needed. Such a platform would benefit research in the academic community and practical development in industry, and improve the collaboration between these two communities.

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