Si3N4 is difficult to be machined due to its hard and brittle nature. In order to improve its machining quality, a new method of ultrasonic-assisted laser machining is proposed. The machining device is established including Nd: YAG pulsed laser, ultrasonic vibration stage and water flow system. Etching experiments of laser machining with and without sample vibration in anhydrous conditions and in water conditions are studied respectively. A VM-3030E two-dimensional image measuring instrument is applied to detect shape and measure dimension of the sample. Microstructure morphology of the sample is observed by a JSM-7500F scanning electron microscope. Experimental results show that there are fewer slags on inner surfaces of V-shaped grooves when laser machining with water flow. The surface quality and depth-to-width ratio of grooves machined by laser with vibration on sample are improved significantly in comparison with those without vibration. The depth-to-width ratio of groove machined by laser with 90.1W vibration power is near twice than that without vibration.
The gas cylinder is used in most cases, which is often made from alloy structural steel. When it is used in high pressure gas cylinder, the larger volume, higher weight, and larger length will produce. It is found that both in theoretical and experimental analysis that this kind of material has syntactical mechanical properties such as the tension strength and plastic strength, so it can be reused many times.
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