A low-driving energy and bistable recoverable MEMS safety and arming device (S&A), based on microcasting technology and deep silicon etching technology, is proposed to meet safety system requirements. A force–electromagnetic combination solution is constructed for the Si MEMS S&A, with parameters and strength verified, ultimately achieving an S&A size of (13 × 13 × 0.4) mm. Additionally, a low-driving energy U-shaped electromagnetic coil (USEC) model is designed using microcasting technology, and an electrical–magnetic–mechanical coupling mathematical model is established to explore the relationship between design parameters and driving capacity and reliability. With a driving power of 8 V/0.5 A, the model achieves a stable electromagnetic driving force of 15 mN with a travel distance of 0.5 mm. Finally, the fabrication and testing of the USEC and S&A are carried out, with driving capability and S&A disarming ability tests conducted to verify the feasibility of the system design. Compared to the existing S&A, this scheme has the advantages of low-driving energy, recoverability, fast response speed, and strong adaptability.
A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is established according to the heat conduction equation, and the limit conditions of different structures are presented. The finite element multi-physical field simulation method is used to simulate the size and the action voltage of the diversion layer of the control chip. Based on the surface silicon process, fuse processing, and testing with the MEMS solid-state fuse-logic control chip, a diversion layer constant current, maximum current resistance test, and a control layer of different bridge area sizes, the bridge area size is 200 × 30 μm, and the minimum electrical explosion voltage is 23.6 V. The theoretical calculation results at 20 V and 100 μF demonstrate that the capacitor energy is insufficient to support the complete vaporization of the bridge area, but can be partially vaporized, consistent with the experimental results.
Detonation waves released by energetic materials provide an important means of physical self-destruction (Psd) for information storage chips (ISCs) in the information insurance field and offer advantages that include a rapid response and low driving energy. The high electrical sensitivity of energetic materials means that they are easily triggered by leakage currents and electrostatic forces. Therefore, a Psd module based on a graphene-based insurance actuator heterogeneously integrated with energetic materials is proposed. First, the force–balance relation between the electrostatic van der Waals force and the elastic recovery force of the insurance actuator’s graphene electrode is established to realize physical isolation and an electrical interconnection between the energetic materials and the peripheral electrical systems. Second, a numerical analysis of the detonation wave stress of the energetic materials in the air domain is performed, and the copper azide dosage required to achieve reliable ISC Psd is obtained. Third, the insurance actuator is prepared via graphene thin film processing and copper azide is prepared via an in situ reaction. The experimental results show that the energetic materials proposed can release physical isolation within 14 μs and can achieve ISC Psd under the application of a voltage signal (4.4–4.65 V). Copper azide (0.45–0.52 mg) can achieve physical damage over an ISC area (23.37–35.84 mm2) within an assembly gap (0.05–0.25 mm) between copper azide and ISC. The proposed method has high applicability for information insurance.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.