This paper describes the development and evolution of the critical architecture for a laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source for advanced lithography applications in high volume manufacturing (HVM). In this paper we discuss the most recent results from high power sources in the field and testing on our laboratory based development systems, and describe the requirements and technical challenges related to successful implementation of those technologies on production sources. System performance is shown, focusing on pre-pulse operation with high conversion efficiency (CE) and with dose control to ensure high die yield. Finally, experimental results evaluating technologies for generating stable EUV power output for a high volume manufacturing (HVM) LPP source will be reviewed.
The thermoacoustic response of an industrial-scale gas turbine combustor to fuel flow perturbations is examined. Experimental measurements in a laboratory combustor along with numerical modeling results are used to identify the dynamic behavior of the combustor over a variety of operating conditions. A fast-response actuator was coupled to the fuel system to apply continuous sinusoidal perturbations to the total fuel mass flow rate. The effects of these perturbations on the combustor pressure oscillation characteristics as well as overall operability of the system are described. The results of this work suggest that persistent excitation of the fuel system may present a viable means of controlling combustion dynamics in industrial gas turbine and, in turn, enhance their performance.
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