Abstract-A 6-b radio frequency (RF) microelectromechanical system (MEMS) time delay circuit operating from dc to 10 GHz with 393.75-ps total time delay is presented. The circuit is fabricated on 250-m-thick alumina and uses metal contacting RF MEMS switches to realize series-shunt SP4T switching networks.The circuit demonstrates 1.8 + 0.6 dB of loss at 10 GHz and has linear phase response across the entire band with accuracy of better than a least significant bit for most states.
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