The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of <100>. Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analysed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.
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