<title>Micro-opto-electro-mechanical (MOEM) vibration sensor</title>

Abstract

The combination of Integrated Optics with micro-mechanical structures on silicon offers immense potential for smart structure applications. One such application is sensing and mapping of vibration and vibrational modes. In the present proposal, a cantilever formed by bulk micro machining of <100>. Silicon and optical waveguides formed by sol-gel process is considered. Among the various configurations possible, an optical directional coupler located close to foot of the cantilever is analysed in detail. Analytical and simulation result using optical coupled mode theory to obtain the power transfer that is dependent on cantilever vibrations are presented.

Optical amplification and photosensitivity in sol-gel based waveguides

“…Long-term stability and improved performance along with packaging issues need to be addressed soon so that the inherent potential in terms of economy and flexibility offered by the sol-gel technology becomes practical. With increasing interest in micro-electro-mechanical systems for sensors, smart structures, and communications applications, the sol-gel process attains further importance in developing optical MEMS where optical devices could be controlled by mechanical structures [64]. The sol-gel process thus presents a simple and effective route to conceive and develop novel integrated optic devices.…”