Chemical mechanical polishing of copper was performed using H 2 O 2 as oxidizer and alumina particles as abrasives. Electrochemical techniques were used to investigate the dissolution/passivation behavior of high-purity Cu disk under static and dynamic conditions at pH 4 with varying H 2 O 2 concentrations. Changes in the surface chemistry of the statically etched Cu disk were investigated using X-ray photoelectron spectroscopy. The Cu removal rate reached a maximum at 1% H 2 O 2 concentration and decreased with a further increase in H 2 O 2 concentration. The static etch rate showed the same trend. The etched surface morphology indicates that the removal of copper is primarily the result of electrochemical dissolution of copper at low H 2 O 2 concentrations. However, at increased H 2 O 2 concentrations, the copper oxidation rate increases, resulting in a change in the Cu removal mechanism to mechanical abrasion of the oxidized surface.
Due to their excellent thermal and mechanical properties silicon‐based ceramics and composites are prime candidates for high temperature structural applications. In this communication the authors report for the first time that amorphous silicoaluminum carbonitride (SiAlCN) ceramics possess anomalously high resistance to oxidation and hot‐corrosion. A mechanism underlying the observed phenomena is discussed.
The yields of 42 projectile-like fragments (PLFs) and fission fragments and 36 targetlike fragments (TLFs) were measured using off-line γ-ray spectroscopy in a thin target experiment involving the 136 Xe + 198 Pt reaction. The center of target beam energy was 760.5 MeV(E c.m. = 450 MeV). The reported yields are compared with those from previous measurements for this reaction and with predictions of the GRAZING, di-nuclear systems (DNS) and Improved Quantum Molecular Dynamics (ImQMD)models. The yields of the TLFs and PLFs are, in general, substantially smaller than those previously observed at a beam energy of 1085 MeV. Neither the GRAZING or DNS models correctly describes the measured TLF and PLF yields in this lower-energy reaction but the ImQMD model describes these yields adequately.
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