EXODUS II is a model developed to store and retrieve data for finite element analyses. It is used for preprocessing (problem definition), postprocessing (results visualization), as well as code to code data transfer.
We report the first switchable piezoelectric resonator as a building block for a new class of adaptive and reconfigurable filters. The resonator integrates AlN contourmode resonator and RF MEMS capacitive switch technologies to change the coupling between the RF signal electrodes and the AlN piezoelectric film. Modeling reveals that a 1.5 μm gap minimizes coupling, while a 10 nm gap couples nearly as efficiently as an electrode in intimate contact, suggesting that high contrast can be achieved using this approach. Measurements of a 400 ȝm x 150 ȝm two-port resonator demonstrate a switching ratio of 13 dB, a Q of 170, and a center frequency of 240 MHz. Research is continuing with goals of improving the device Q and switching ratio, extending the device operation to other frequencies, and extending the approach to adaptive and reconfigurable filters.
This report describes the SummitView 1.0 computer code developed at Sandia National Laboratories. SummitView is designed to generate a 3D solid model, amenable to visualization and meshing, that represents the end state of a microsystem fabrication process such as the SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) V process. Functionally, SummitView performs essentially the same computational task as an earlier code called the 3D Geometry modeler [1]. However, because SummitView is based on 2D instead of 3D data structures and operations, it has significant speed and robustness advantages. As input it requires a definition of both the process itself and the collection of individual 2D masks created by the designer and associated with each of the process steps. The definition of the process is contained in a special process definition file [2] and the 2D masks are contained in MEM format files [3]. The code is written in C++ and consists of a set of classes and routines. The classes represent the geometric data and the SUMMiT V process steps. Classes are provided for the following process steps: Planar Deposition, Planar Etch, Conformal Deposition, Dry Etch, Wet Etch and Release Etch.SummitView is built upon the 2D Boolean library GBL-2D [4], and thus contains all of that library's functionality.
This paper describes the SUMMiT® V Design Tools, a suite of CAD tools that enable a SUMMiT® (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to meet the ‘Design-To-Analysis’ challenge. Sandia has developed a MEMS design tool suite integrated with a commercial 3D mechanical CAD tool, AutoCAD®. Designed for use with the SUMMiT® process, it includes in-house written design tools: a 2D Process Visualizer [2], a fast 3D Visualizer, a detailed 3D Model Generator [3], a finite element mesh generator [4], a library of standard components [5], and a Design Rule Check system [6].
This report describes version 1.0 of GBL-2D, a geometric Boolean library for 2D objects. The library is written in C++ and consists of a set of classes and routines. The classes primarily represent geometric data and relationships. Classes are provided for 2D points, lines, arcs, edgeuses, loops, surfaces and mask sets. The routines contain algorithms for geometric Boolean operations and utility functions. Routines are provided that incorporate the Boolean operations: Union(OR), XOR, Intersection and Difference. A variety of additional analytical geometry routines and routines for importing and exporting the data in various file formats are also provided.The GBL-2D library was originally developed as a geometric modeling engine for use with a separate software tool, called SummitView [1], that manipulates the 2D mask sets created by designers of Micro-Electro-Mechanical Systems (MEMS). However, many other practical applications for this type of software can be envisioned because the need to perform 2D Boolean operations can arise in many contexts.
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