The physical processes occurring in a laser-plasma source is used for deposition nanostructures. The laser-plasma source is an erosion laser plume of the target material and a substrate located in a vacuum chamber. It has been proposed to place a grid between the laser target and the substrate. A negative potential is applied to the grid relative to the laser target to smoothly adjust the parameters of the particles deposited on the substrate. As a result, a particles flow is formed after a grid. This particle flow is predominantly consisting of ions. The energy of the ions can be reliably and smoothly controlled by applying a positive potential to the grid relative to the substrate. It has been experimentally proved method for deposition of nanofilms using ion beams from the laser plasma. It has been shown that different regimes of substrate surface treatment can be implemented in the laser-plasma source for deposition nanostructures. Using this source, you can sequentially clean the surface of the substrate without depressurizing the vacuum chamber, and create a pseudodiffusion layer of the laser target material near the surface layer of the substrate. It will allow producing it possible to obtain highly adhesive nanofilms with predetermined parameters.
The present work is devoted to the experimental determination of the uniformity of the ion flux density on a substrate with an increased size (~200 cm2 ) in order to form nanostructures by the laser-plasma method. The system for deposition of nanostructures consists of an erosion laser torch of the target material and a substrate located in a vacuum chamber. For smooth adjustment of the parameters of the deposited particles on the substrate, a grid is located between the laser target and the substrate, on which a negative potential is applied relative to the laser target. As a result, a particle stream is formed after the grid, consisting mainly of ions, whose energy can be reliably and smoothly controlled by applying a positive potential to the grid in relation to the substrate. Experiments have shown that the uniformity of the density of ion fluxes on a substrate of increased size (~200 cm2 ) in a laser-plasma source for nanocoating can be increased by applying an accelerating potential to the substrate in relation to the grid. The minimum difference between the ion flux density in the center of the target and at its edge can be reduced to ~5 %. As a result, it is technologically possible to clean the surface of the substrate with ions of the laser target material (secondary emission), create a pseudodiffusion layer of the target material in the near-surface region of the substrate, and apply the laser target material to the substrate. At the same time, all these operations can be performed sequentially without depressurising the vacuum chamber. This allows obtaining coating with good adhesion on substrates of increased size.
The temporal characteristics of the glow intensity of erosion laser plumes near the surface under the action of nanosecond laser pulses on a carbon target are experimentally studied. The interaction of laser radiation with the destruction products of plume is minimal due to the formation of erosion plasma with a delay relative to the acting laser pulse. Using a modernized spectrometer, the spectral characteristics of an erosion
laser plume near the surface of a carbon target with a time resolution of 10–8 s are studied, and the characteristic plasmodynamic times in the plume are ~10–6 s. It is shown that the emission of spectral lines of carbon appears with a delay relative to the glow of the continuous background, when the erosion plume is cooled during expansion. The results of the study make it possible to optimize some characteristics of the laser-
plasma source for the deposition of nanocoatings.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.